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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 7, Iss. 3 — Mar. 1, 2009
  • pp: 180–182

Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region

Hui Lin, Lichao Zhang, Chunshui Jin, Hongjun Zhou, and Tonglin Huo  »View Author Affiliations


Chinese Optics Letters, Vol. 7, Issue 3, pp. 180-182 (2009)


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Abstract

We fabricate and measure a multilayer-coated ion-beam-etched laminar grating for the extreme ultraviolet wavelength region. The fabrication process is carefully controlled so that the grating groove and multilayer-coating parameters well meet the design targets. At an incident angle of 10\degree, the peak diffraction efficiency of the +1st order is 20.6% at 14.56 nm and that of the -1st order is 22.1% at 14.65 nm, both close to the theoretical limits.

© 2009 Chinese Optics Letters

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(310.1620) Thin films : Interference coatings
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

Citation
Hui Lin, Lichao Zhang, Chunshui Jin, Hongjun Zhou, and Tonglin Huo, "Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region," Chin. Opt. Lett. 7, 180-182 (2009)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-7-3-180


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