We fabricate and measure a multilayer-coated ion-beam-etched laminar grating for the extreme ultraviolet wavelength region. The fabrication process is carefully controlled so that the grating groove and multilayer-coating parameters well meet the design targets. At an incident angle of 10\degree, the peak diffraction efficiency of the +1st order is 20.6% at 14.56 nm and that of the -1st order is 22.1% at 14.65 nm, both close to the theoretical limits.
© 2009 Chinese Optics Letters
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(310.1620) Thin films : Interference coatings
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
Hui Lin, Lichao Zhang, Chunshui Jin, Hongjun Zhou, and Tonglin Huo, "Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region," Chin. Opt. Lett. 7, 180-182 (2009)