OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 7, Iss. 8 — Aug. 1, 2009
  • pp: 724–727

Research on the resolution of micro stereo lithography

Xiang Wang, Jijun He, Xiangtao Pei, Peng Shao, Jiaru Chu, and Wenhao Huang  »View Author Affiliations


Chinese Optics Letters, Vol. 7, Issue 8, pp. 724-727 (2009)


View Full Text Article

Acrobat PDF (1420 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

Micro stereo lithography is a kind of technology utilizing the solidified effect that photo curable polymer will appear under ultraviolet (UV) laser exposure. It is widely used in three-dimensional (3D) micro fabrication. We get the experimental values of a pair of UV laser curing coefficients, absorption coefficient and critical curing energy, of curable resin by fitting the calculation results of the Gaussian beam theory and experimental curing results. The theoretical relation between the curing unit's shape and the exposure features of time and intensity of convergent Gaussian beam is presented. The calculation and experimental results of curing unit under different conditions agree well with each other. This research offers a steady base for further research about the improvement of resolution.

© 2009 Chinese Optics Letters

OCIS Codes
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4610) Optical design and fabrication : Optical fabrication

Citation
Xiang Wang, Jijun He, Xiangtao Pei, Peng Shao, Jiaru Chu, and Wenhao Huang, "Research on the resolution of micro stereo lithography," Chin. Opt. Lett. 7, 724-727 (2009)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-7-8-724


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. D. Ma, X. Wang, C. Wu, and W. Huang, China Mechnical Engineering (in Chinese) 15, 1650 (2004).
  2. K. Kobayashi and K. Ikuta, in Proceedings of the 2005 IEEE International Symposium on Micro-NanoMechatronics and Human Science 273 (2005).
  3. X. Zhang, X. N. Jiang, and C. Sun, Sens. Actuat. A 77, 147 (1999).
  4. http://www.microtec-d.com/html/c-products/e-production.html (Sep. 26, 2008).
  5. S. P. Deshmukh, S. Dubey, and P. S. Grandhi, Proc. SPIE 6109, 61090C (2006).
  6. Y. Kanamori, J. Sato, T. Shimano, S. Nakamura, and K. Hane, Microsyst. Technol. 13, 1411 (2007).
  7. D. Wang and L. Jiang, UV Curing Materials: Theory and Application (in Chinese) (Science Press, Beijing, 2001).
  8. S. Li and C. Ji, Light Chemistry Principle and Applications of Polymers (in Chinese) (Fudan University Press, Shanghai, 1993).
  9. H. Qi, L. Ruan, S. Wang, M. Shi, and H. Zhao, Chin. Opt. Lett. 6, 346 (2008).
  10. A. Shirkavand, S. Sarkar, M. Hejazi, L. Ataie-Fashtami, and M. R. Alinaghizadeh, Chin. Opt. Lett. 5, 238 (2007).
  11. D. Yu and H. Tan, (eds.) Engineering Optics (in Chinese) (China Machine Press, Beijing, 2000).
  12. J. Tang, L. Hu, T. Meng, Q. Dong, and F. Gan, Chinese J. Lasers (in Chinese) 35, 1573 (2008).
  13. C. Lü, Z. Cui, and B. Yang, Chin. J. Appl. Chem. (in Chinese) 18, 342 (2001).
  14. J. Chu, X. Wen, W. Ding, and C. Xu, Chem. J. Chin. Univ. (in Chinese) 24, 731 (2003).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited