OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 7, Iss. 8 — Aug. 1, 2009
  • pp: 724–727

Research on the resolution of micro stereo lithography

Xiang Wang, Jijun He, Xiangtao Pei, Peng Shao, Jiaru Chu, and Wenhao Huang  »View Author Affiliations


Chinese Optics Letters, Vol. 7, Issue 8, pp. 724-727 (2009)


View Full Text Article

Acrobat PDF (1420 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

Micro stereo lithography is a kind of technology utilizing the solidified effect that photo curable polymer will appear under ultraviolet (UV) laser exposure. It is widely used in three-dimensional (3D) micro fabrication. We get the experimental values of a pair of UV laser curing coefficients, absorption coefficient and critical curing energy, of curable resin by fitting the calculation results of the Gaussian beam theory and experimental curing results. The theoretical relation between the curing unit's shape and the exposure features of time and intensity of convergent Gaussian beam is presented. The calculation and experimental results of curing unit under different conditions agree well with each other. This research offers a steady base for further research about the improvement of resolution.

© 2009 Chinese Optics Letters

OCIS Codes
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4610) Optical design and fabrication : Optical fabrication

Citation
Xiang Wang, Jijun He, Xiangtao Pei, Peng Shao, Jiaru Chu, and Wenhao Huang, "Research on the resolution of micro stereo lithography," Chin. Opt. Lett. 7, 724-727 (2009)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-7-8-724

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited