OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters


  • Vol. 8, Iss. 12 — Dec. 10, 2010
  • pp: 1163–1166

Optimization designed large-stroke MEMS micromirror for adaptive optics

Quan Sun, Kelly He, and Edmond Cretu  »View Author Affiliations

Chinese Optics Letters, Vol. 8, Issue 12, pp. 1163-1166 (2010)

View Full Text Article

Acrobat PDF (1043 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


A novel micromirror based on the PolyMUMPs process is designed and presented. The hexagonal micromirror with a diameter of 450 ?m consists of three supporting bilayer cantilevers and a mirror plate. The bilayer cantilevers, formed with a polysilicon layer and a gold layer, elevate the mirror plate according to residual stress-induced bending. Both analytical and finite element analysis (FEA) models are built to calculate the elevated height of the free end of the cantilever. The analytical solution is in accordance with the FEA simulation results, with longitudinal stresses applied only. Results of a three-dimensional (3D) simulation with two direction stresses applied also show the elevated height to be proportional to the width of the cantilever and the length of the gold layer. Due to the torque of the joint, the elevated heights of the two kinds of cantilevers assembled with the mirror plates are much smaller than those of the free end of the cantilevers. Both micromirrors with different cantilevers are fabricated. The elevated heights of the fabricated micromirrors are measured using Veeco optical profiler, which show good coincidence with simulation results.

© 2010 Chinese Optics Letters

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3990) Optical devices : Micro-optical devices
(230.4685) Optical devices : Optical microelectromechanical devices

Quan Sun, Kelly He, and Edmond Cretu, "Optimization designed large-stroke MEMS micromirror for adaptive optics," Chin. Opt. Lett. 8, 1163-1166 (2010)

Sort:  Author  |  Year  |  Journal  |  Reset


  1. P. M. Hagelin, U. Krishnamoorthy, J. P. Heritage, and O. Solgaard, IEEE Photon. Technol. Lett. 12, 882 (2000).
  2. W. Li, J. Liang, X. Li, Y. Zhong, Z. Liang, and D. Sun, Acta Opt. Sin. (in Chinese) 28, 1151 (2008).
  3. M. C. Wu, Proc. SPIE 5715, 1 (2005).
  4. D. Wang and S. Wei, Acta Opt. Sin. (in Chinese) 28, 51 (2008).
  5. M. A. Michalicek, N. Clark, and J. H. Comtois, Proc. SPIE 3353, 805 (1998).
  6. S. Waldis, F. Zamkotsian, P. A. Clerc, W. Noell, M. Zickar, and N. de Rooij, IEEE J. Sel. Top. Quantum Electron. 13, 168 (2007).
  7. A. Dubra, D. C. Gray, J. I. W. Morgan, and D. R. Williams, Proc. SPIE 6888, 688803 (2008).
  8. L. M. C. A. Thompson, M. W. K. Flath, S. C. Wilks, R. A. Young, G. W. Johnson, and A. J. Ruggiero, Proc. SPIE 4821, 129 (2002).
  9. J. Li, H. Q. Chen, G. P. Yan, Y. Liu, and P. Wu, Proc. SPIE 5985, 59851R (2005).
  10. J. Carter, A. Cowen, B. Hardy, R. Mahadevan, M. Stonefield, and S. Wilcenski, PolyMUMPs Design Handbook (Revision 11.0, MEMSCAP Inc., 2005).
  11. M. A. Rosa, D. D. Bruyker, A. R. Volkel, E. Peeters, and J. Dunec, J. Micromech. Microeng. 14, 446 (2004).
  12. J. Comtois, A. Michalicek, W. Cowan, and J. Butler, Sensors and Actuators A 78, 54 (1999).
  13. Q. Sun, M. Cai, N. Y. Wang, and E. Cretu, Proc. SPIE 7510, 751003 (2009).
  14. S. M. N. Rao, P. Pandojirao-Sunkojirao, N. Dhaubanjar, M. Chiao, and J. Chiao, Int. J. Optomechatron. 3, 149 (2009).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited