We report the fabrication of submicrometer pits array (SP-array) on 6H-SiC surface by the interference of two femtosecond laser beams. Formation mechanisms and optical absorption of SP-array are studied. The relative reflectivity and transmissivity of white light decrease to 10% of the values of SiC crystal, and the optical absorption is enhanced to 97%. The relative reflectivity and transmissivity of incident angles within the range of 20o~60o are kept below 25%. The enhancement mechanism of optical absorption of the SP-array is also discussed.
© 2010 Chinese Optics Letters
(320.7130) Ultrafast optics : Ultrafast processes in condensed matter, including semiconductors
(110.4235) Imaging systems : Nanolithography
(220.4241) Optical design and fabrication : Nanostructure fabrication
Yi Zhang, Xin Jia, Pingxin Xiong, and Tianqing Jia, "Fabrication and enhanced optical absorption of submicrometer pits array on 6H-SiC via two-beam interference of femtosecond laser," Chin. Opt. Lett. 8, 1203-1206 (2010)