The self-mixing interferometer is used to investigate the characteristics of resonant frequency of the microresonator, which is excited by a sinusoidally driven loud-speaker. The detected self-mixing signal is processed by the phase reconstruction method. The 1st-order resonant frequency of the microresonator is measured to be 4.437 kHz with full-width at half-maximum (FWHM) of 0.13 kHz. The measurement results are verified by the sinusoidal phase modulating (SPM) interferometer.
© 2010 Chinese Optics Letters
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(220.4840) Optical design and fabrication : Testing
(230.5750) Optical devices : Resonators
Shaoqing Wang and Xiangzhao Wang, "Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method," Chin. Opt. Lett. 8, 177-180 (2010)