Angle-deviation optical profilometer
Chinese Optics Letters, Vol. 9, Issue 1, pp. 011201- (2011)
Acrobat PDF (569 KB)
Abstract
We propose a new optical profilometer for three-dimensional (3D) surface profile measurement in real time. The deviation angle is based on geometrical optics and is proportional to the apex angle of a test plate. Measuring the reflectivity of a parallelogram prism allows detection of the deviation angle when the beam is incident at the nearby critical angle. The reflectivity is inversely proportional to the deviation angle and proportional to the apex angle and surface height. We use a charge-coupled device (CCD) camera at the image plane to capture the reflectivity profile and obtain the 3D surface profile directly.
© 2011 Chinese Optics Letters
OCIS Codes
(100.2000) Image processing : Digital image processing
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(080.2468) Geometric optics : First-order optics
Citation
Chen-Tai Tan, Yuan-Sheng Chan, Zhen-Chin Lin, and Ming-Hung Chiu, "Angle-deviation optical profilometer," Chin. Opt. Lett. 9, 011201- (2011)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-9-1-011201
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Optical Roughness Measurements with Fringe Projection (AO)
- Pulsed Digital Holography for High-Speed Contouring that Uses a Two-Wavelength Method (AO)
- Fast algorithms for data reduction in modern optical three-dimensional profile measurement systems with MMX technology (AO)
- Optical Technique for the Automatic Detection and Measurement of Surface Defects on Thin Metallic Wires (AO)
- Twin-Sensitivity Measurement by Spatial Multiplexing of Digitally Recorded Holograms (AO)
« Previous Article | Next Article »
OSA is a member of 