We propose a new optical profilometer for three-dimensional (3D) surface profile measurement in real time. The deviation angle is based on geometrical optics and is proportional to the apex angle of a test plate. Measuring the reflectivity of a parallelogram prism allows detection of the deviation angle when the beam is incident at the nearby critical angle. The reflectivity is inversely proportional to the deviation angle and proportional to the apex angle and surface height. We use a charge-coupled device (CCD) camera at the image plane to capture the reflectivity profile and obtain the 3D surface profile directly.
© 2011 Chinese Optics Letters
(100.2000) Image processing : Digital image processing
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(080.2468) Geometric optics : First-order optics
Chen-Tai Tan, Yuan-Sheng Chan, Zhen-Chin Lin, and Ming-Hung Chiu, "Angle-deviation optical profilometer," Chin. Opt. Lett. 9, 011201- (2011)