Abstract
A non-scanning, non-interferometric, three-dimensional (3D) optical
profilometer based on geometric optics, critical angle principle, and the use of a
charge-coupled device (CCD) camera is presented. The surface profile of the test
specimen can be transferred into the reflectance profile. The reflectance profile,
obtained from a CCD, is the ratio of the intensity at the critical angle to the
intensity obtained at the total internal reflection angle. The optical profilometer
provides a sub-micron measuring range with nanometer resolution and can be used to
measure roughness or surface defects in real time.
© 2011 Chinese Optics Letters
PDF Article
More Like This
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription