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Chinese Optics Letters

Chinese Optics Letters


  • Vol. 9, Iss. 10 — Oct. 10, 2011
  • pp: 103101–

Thermomechanical analysis of nodule damage in HfO2/SiO2 multilayer coatings

Yongguang Shan, Hongbo He, Chaoyang Wei, Ying Wang, and Yuan'an Zhao  »View Author Affiliations

Chinese Optics Letters, Vol. 9, Issue 10, pp. 103101- (2011)

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Samples with nodular defects grown from gold nanoparticles are prepared, and laser-induced damage tests are conducted on them. Nodular defects, which are in critical state of damage, are cross-sectioned by focusing on the ion beam and by imaging using a field emission scanning electron microscope. The crosssectional profile shows that cracks are generated and propagated along the nodular boundaries and the HfO2/SiO2 interface, or are even melted. The thermomechanical process induced by the heated seed region is analyzed based on the calculations of temperature increase and thermal stress. The numerical results give the critical temperature of the seed region and the thermal stress for crack generation, irradiated with threshold fluence. The numerical results are in good agreement with the experimental ones.

© 2011 Chinese Optics Letters

OCIS Codes
(140.3440) Lasers and laser optics : Laser-induced breakdown
(310.6870) Thin films : Thin films, other properties

Yongguang Shan, Hongbo He, Chaoyang Wei, Ying Wang, and Yuan'an Zhao, "Thermomechanical analysis of nodule damage in HfO2/SiO2 multilayer coatings," Chin. Opt. Lett. 9, 103101- (2011)

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  1. C. J. Stolz, M. D. Feit, and T. V. Pistor, Appl. Opt. 45, 1594 (2006).
  2. Y. Wang, Y. Zhang, X. Liu, W. Chen, and P. Gu, Opt. Commun. 278, 317 (2007).
  3. C. J. Stolz, S. Hafeman, and T. V. Pistor, Appl. Opt. 47, C162 (2008).
  4. J. R. Milward, K. L. Lewis, K. Sheach, and R. A. Heinecke, Proc. SPIE 2114, 309 (1993).
  5. J. F. DeFord and M. R. Kozlowski, Proc. SPIE 1848, 455 (1992).
  6. X. Liu, D. Li, Y. Zhao, and X. Li, Appl. Opt. 49, 1774 (2010).
  7. X. Liu, D. Li, Y. Zhao, X. Li, and J. Shao, Appl. Surf. Sci. 256, 3783 (2010).
  8. X. Liu, D. Li, Y. Zhao, X. Li, X. Ling, and J. Shao, Chin. Opt. Lett. 8, 41 (2010).
  9. X. Ling, J. Shao, and Z. Fan, J. Vac. Sci. Technol. A 27, 183 (2009).
  10. J. Dijon, M. Poulingue, and J. Hue, Proc. SPIE 3578, 387 (1999).
  11. R. Sawicki, C. Shang, and T. Swatloski, Proc. SPIE 2428, 333 (1994).
  12. Y. Shan, H. He, C. Wei, S. Li, M. Zhou, D. Li, and Y. Zhao, Appl. Opt. 49, 4290 (2010).
  13. C. H. Chan, Appl. Phys. Lett. 26, 628 (1975).
  14. C. Wei, J. Shao, H. He, K. Yi, and Z. Fan, Opt. Express 16, 3376 (2008).
  15. Y. Takeuti, Thermal Stress (in Chinese) (Science, Beijing, 1977).
  16. M. Poulingue, J. Dijon, M. Ignat, H. Leplan, and B. Pinot, Proc. SPIE 3578, 370 (1999).
  17. J. Dijon, G. Ravel, and B. Andre, Proc. SPIE 3578, 398 (1999).
  18. T. Spalvins and W. A. Brainard, J. Vac. Sci. Technol. 11, 1186 (1974).
  19. F. Bonneau, P. Combis, J. L. Rullier, J. Vierne, B. Bertussi, M. Commandre, L. Gallais, J. Y. Ntoli, I. Bertron, F. Malaise, and J. T. Donohue, Appl. Phys. B 78, 447 (2004).
  20. C. Stolz, F. Genin, T. Reitter, N. Molau, R. Bevis, M. Gunten, D. Smith, and J. Anzellotti, Proc. SPIE 2966, 265 (1997).

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