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Optica Publishing Group
  • Chinese Optics Letters
  • Vol. 9,
  • Issue 2,
  • pp. 023102-
  • (2011)

Mo/Si aperiodic multilayer broadband reflective mirror for 12.5-28.5-nm wavelength range

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Abstract

Aperiodic molybdenum/silicon (Mo/Si) multilayer designed as a broadband reflective mirror with mean reflectivity of 10% over a wide wavelength range of 12.5-28.5 nm at incidence angle of 5? is developed using a numerical optimized method. The multilayer is prepared using direct current magnetron sputtering technology. The reflectivity is measured using synchrotron radiation. The measured mean reflectivity is 7.0% in the design wavelength range of 12.5-28.5 nm. This multilayer broadband reflective mirror can be used in extreme ultraviolet measurements and will greatly simplify the experimental arrangements.

© 2011 Chinese Optics Letters

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