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Chinese Optics Letters

Chinese Optics Letters


  • Vol. 9, Iss. 6 — Jun. 10, 2011
  • pp: 063001–

Spectroscopic characterization of fluorine atoms in atmospheric pressure He/SF6 plasmas

Huiliang Jin, Bo Wang, and Feihu Zhang  »View Author Affiliations

Chinese Optics Letters, Vol. 9, Issue 6, pp. 063001- (2011)

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We investigate reactive fluorine atom spectroscopic characterization in atmospheric pressure of He/SF6 plasma using atomic emission spectrometry. As input radio frequency (RF) power levels are raised from 140 to 220 W, the emission spectra of 685.60 (3p4D-3s4P transition) and 739.87 nm (3p4P-3s4P transition) increase significantly. Moreover, an optimal value of SF6 volume concentration in the production of fluorine radicals, which is 0.8% is achieved. Addition of certain amounts of O2 into He/SF6 plasma results in the promotion of SF6 dissociation. Emission intensities of fluorine atoms show the maximum at the O2/SF6 ratio of 0.4.

© 2011 Chinese Optics Letters

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(300.2140) Spectroscopy : Emission
(300.6210) Spectroscopy : Spectroscopy, atomic

Huiliang Jin, Bo Wang, and Feihu Zhang, "Spectroscopic characterization of fluorine atoms in atmospheric pressure He/SF6 plasmas," Chin. Opt. Lett. 9, 063001- (2011)

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