A new removal optimization method called submerged jet polishing (SJP) is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic (PV) 0.066 \lambda to 0.024 \lambda (\lambda=632.8 nm) after three iterations, and the root mean square (RMS) value is improved from 0.013 \lambda to 0.00395 \lambda. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.
© 2011 Chinese Optics Letters
Chunyan Shi, Jiahu Yuan, Fan Wu, and Yongjian Wan, "Ultra-precision figuring using submerged jet polishing," Chin. Opt. Lett. 9, 092201- (2011)