Abstract
A novel technique for the fabrication of tin-doped indium oxide (ITO)
fine patterning in sol-gel technology is presented in this paper. The fabricated
ITO fine patterning could be obtained through a process which combines film
fabrication with film etching. ITO films have good comprehensive property
of visible transmittance and electrical conductivity, consequently they have
been extensively used as coating electrodes. Indium nitrate (In(NO<sub>3</sub>)<sub>3</sub>.4.5H<sub>2</sub>O) and stannic chloride (SnCl<sub>4</sub>.5H<sub>2</sub>O) were used as starting materials which were modified with benzytone (BzAcH). The chelate complexes
containing indium ions were produced during the process which of forming photosensitive
ITO/BzAcH gel films through sol-gel technique. It was found that the gel films
are sensitive to both the ultraviolet (UV) light irradiation and their solubility
on solvents as well. For example, ethanol was reduced remarkably while the
UV absorption peak disappeared with the dissociation of the chelate complexes
correspondingly by means of UV-vis and IR spectrophotometers. Utilizing these
characteristics, a fine pattern was obtained by irradiation of UV light on
the ITO/BzAcH gel films through a pattern mask. of the fine patterned ITO
films were heat treated at 500 °C for 15 min, the optical, electrical properties and the surface
element components were examined by X-ray photoelectron spectroscopy (XPS)
spectra in this work.
© 2006 IEEE
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