OSA's Digital Library

Journal of Display Technology

Journal of Display Technology

| A JOINT IEEE/OSA PUBLICATION

  • Vol. 5, Iss. 7 — Jul. 1, 2009
  • pp: 273–288

Origins of High Mobility and Low Operation Voltage of Amorphous Oxide TFTs: Electronic Structure, Electron Transport, Defects and Doping

Toshio Kamiya, Kenji Nomura, and Hideo Hosono

Journal of Display Technology, Vol. 5, Issue 7, pp. 273-288 (2009)


View Full Text Article

Acrobat PDF (2375 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

Amorphous oxide semiconductors (AOSs) are expected as new channel materials in thin-film transistors (TFTs) for large-area and/or flexible flat-panel displays and other giant-microelectronics devices. So far, many prototype displays have been demonstrated in these four years since the first report of AOS TFT. The most prominent feature of AOS TFTs is that they operate with good performances even if they are fabricated at low temperatures without a defect passivation treatment. The TFT mobilities exceed 10 ${\hbox{cm}}^{2}/({\hbox{V}}\cdot{\hbox{s}})$, which are more than ten times larger than those of conventional amorphous semiconductor devices. In addition, they operate at low voltages, e.g., ${<}{\hbox{5\ V}}$ owing to their small subthreshold voltage swings. These features indicate that electron transport in oxide semiconductors are insensitive to random structures and these oxides do not form high-density defects that affect electron transport and TFT operation. In this paper, we discuss the origins of the prominent features of AOS devices from the viewpoint of materials science of AOS.

© 2009 IEEE

Citation
Toshio Kamiya, Kenji Nomura, and Hideo Hosono, "Origins of High Mobility and Low Operation Voltage of Amorphous Oxide TFTs: Electronic Structure, Electron Transport, Defects and Doping," J. Display Technol. 5, 273-288 (2009)
http://www.opticsinfobase.org/jdt/abstract.cfm?URI=jdt-5-7-273

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article

OSA is a member of CrossRef.

CrossCheck Deposited