Abstract

We present the results obtained with an extended-gate ISFET totally based on amorphous oxides (GIZO as the semiconductor, ${{Ta}}_{2}{{O}}_{5}{{:SiO}}_{2}$ as the dielectric and ${{Ta}}_{2}{{O}}_{5}$ as the sensitive layer). A full characterization of the device was performed with constant ionic strength pH buffer solutions, revealing a sensitivity of 40 mV/pH with small hysteresis, and good linearity in the pH 4–pH 10 range buffer solutions. These results clearly show that it is possible to produce room-temperature disposable and low cost bio-sensors.

© 2012 IEEE

Extended x-ray absorption fine structure measurements on asymmetric bipolar pulse direct current magnetron sputtered Ta₂O₅ thin films

S. Maidul Haque, Pankaj R. Sagdeo, D. D. Shinde, J. S. Misal, S. N. Jha, D. Bhattacharyya, and N. K. Sahoo
Appl. Opt. 54(22) 6744-6751 (2015)

Effect of sputtering power on the physical properties of amorphous SiO₂-doped InZnO transparent conductive oxide

Jin Young Hwang and Sang Yeol Lee
Appl. Opt. 63(1) 249-254 (2024)

Tantalum oxide and silicon oxide mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors

Shigeng Song, Sijia Cai, Daxing Han, Carlos García Nuñez, Gong Zhang, Gavin Wallace, Lewis Fleming, Kieran Craig, Stuart Reid, Iain W. Martin, Sheila Rowan, and Des Gibson
Appl. Opt. 62(7) B73-B78 (2023)

Optical fiber refractometers based on indium tin oxide coatings fabricated by sputtering

S. Lopez, I. del Villar, C. Ruiz Zamarreño, M. Hernaez, F. J. Arregui, and I. R. Matias
Opt. Lett. 37(1) 28-30 (2012)

Spectrally selective energy-saving coatings based on reactively sputtered bismuth oxide thin films

M. F. Al-Kuhaili, M. E. Daoud, and M. B. Mekki
Opt. Mater. Express 10(2) 449-463 (2020)