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Journal of Display Technology

Journal of Display Technology


  • Editor: Shin-Tson Wu
  • Vol. 1, Iss. 2 — Dec. 1, 2005
  • pp: 289–

A Lithographic Process for Integrated Organic Field-Effect Transistors

Ioannis Kymissis, Akintunde Ibitayo Akinwande, and Vladimir Bulovic

Journal of Display Technology, Vol. 1, Issue 2, pp. 289- (2005)

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This paper reports a photolithographic process for fabricating organic field-effect transistors which provides two layers of metal with arbitrary via placement, and optionally allows for subtractive lithographic patterning of the transistor active layer. The demonstrated pentacene transistors have a field-effect mobility of 0.1 ± 0.05 cm2/(V·s). Parylene-C is used both as the gate dielectric and an encapsulation layer which allows for subtractive lithographic patterning. Also demonstrated is a PMOS inverter without level shifting circuitry and level-restoring VHigh and VLow. This work demonstrates a high definition, multilayer, integrated photolithographic process which creates organic field effect transistors suitable for use in integrated circuit applications such as a display backplanes.

© 2005 IEEE

ToC Category:
Research Papers

Ioannis Kymissis, Akintunde Ibitayo Akinwande, and Vladimir Bulovic, "A Lithographic Process for Integrated Organic Field-Effect Transistors," J. Display Technol. 1, 289- (2005)

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