Abstract
A method for fabrication of tri-gate polycrystalline silicon (poly-Si)
transistors with short channel length and width is proposed and demonstrated
without employing costly lithographic tools. Specifically, the method employs
a spacer formation technique to extend source and drain regions so as to scale
down the channel length below sub-lithographic dimension. Concurrently, the
channel width is scaled down below sub-lithographic dimension by using a photoresist
(PR) trimming technique. Our results show that the reduction in the planar
channel width is essential for suppressing the short-channel effects. Finally,
devices with channel length of 120 nm and planar channel width of 110 nm are
demonstrated with superior electrical characteristics in terms of small subthreshold
swing (146 mV/dec) and low drain-induced-barrier-lowing value (100 mV/V).
© 2014 IEEE
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