OSA's Digital Library

Journal of Display Technology

Journal of Display Technology

| A JOINT IEEE/OSA PUBLICATION

  • Vol. 2, Iss. 2 — Jun. 1, 2006
  • pp: 175–179

Using the Photolysis of Chemically Modified Gel Films Preparing ITO Fine Patterned Thin Films

Ying Li, Gaoyang Zhao, Weihua Zhang, and Yuanqing Chen

Journal of Display Technology, Vol. 2, Issue 2, pp. 175-179 (2006)


View Full Text Article

Acrobat PDF (883 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

A novel technique for the fabrication of tin-doped indium oxide (ITO) fine patterning in sol-gel technology is presented in this paper. The fabricated ITO fine patterning could be obtained through a process which combines film fabrication with film etching. ITO films have good comprehensive property of visible transmittance and electrical conductivity, consequently they have been extensively used as coating electrodes. Indium nitrate (In(NO<sub>3</sub>)<sub>3</sub>.4.5H<sub>2</sub>O) and stannic chloride (SnCl<sub>4</sub>.5H<sub>2</sub>O) were used as starting materials which were modified with benzytone (BzAcH). The chelate complexes containing indium ions were produced during the process which of forming photosensitive ITO/BzAcH gel films through sol-gel technique. It was found that the gel films are sensitive to both the ultraviolet (UV) light irradiation and their solubility on solvents as well. For example, ethanol was reduced remarkably while the UV absorption peak disappeared with the dissociation of the chelate complexes correspondingly by means of UV-vis and IR spectrophotometers. Utilizing these characteristics, a fine pattern was obtained by irradiation of UV light on the ITO/BzAcH gel films through a pattern mask. of the fine patterned ITO films were heat treated at 500 °C for 15 min, the optical, electrical properties and the surface element components were examined by X-ray photoelectron spectroscopy (XPS) spectra in this work.

© 2006 IEEE

Citation
Ying Li, Gaoyang Zhao, Weihua Zhang, and Yuanqing Chen, "Using the Photolysis of Chemically Modified Gel Films Preparing ITO Fine Patterned Thin Films," J. Display Technol. 2, 175-179 (2006)
http://www.opticsinfobase.org/jdt/abstract.cfm?URI=jdt-2-2-175


Sort:  Journal  |  Reset

References

  1. T. Kololuoma, A. H. O. Karkkainen, A. Tolonen, J. T. Rantala, Thin Solid Films 440, 184 (2003).
  2. S. R. Ramanan, Thin Solid Films 389, 207 (2001).
  3. D. Yu, W. Yu, D. Wang, Y. Qian, Thin Solid Films 419, 166 (2002).
  4. C. C. Bowley, A. K. Fontecchio, G. P. Crawfod, J. Appl. Phys. Lett 76, 523 (2000).
  5. C. C. Bowley, G. P. Craofod, J. Appl. Phys. Lett 76, 2235 (2000).
  6. G. Zhao, N. Tohge, J. Ceram. Soc. Jpn. 106, 183 (1998).
  7. G. Zhao, N. Tohge, Materials Res. Bull. 33, 21 (1998).
  8. Z. Weihua, Z. Gaoyang, C. Zhiming, Mater. Sci. Eng. B99, 168 (2003).
  9. G. Zhao, Y. Li, W. Zhang, W. Zhao, OSA Trends in Optics and Photonics (TOP's) 99, Photorefractive Effects, Materials, and Devices Proceedings Volume281 (2005).
  10. G. Zhao, N. Tohge, J. Nishii, Jpn. J. Appl. Phys. 37, 1842 (1998).
  11. S. K. Poznyak, A. J. Kulak, J. Electrochem. 1595 (2001).
  12. S. S. Kim, S. Y. Choi, C. G. Park, H. W. Jin, Thin Solid Films 347, 155 (1999).
  13. J. F. Moulder, Handbook of X-ray Photoelectron Spectroscopy Perkin-Elmer Corp (Perkin-Elmer Corp, 1992).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited