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Journal of Display Technology

Journal of Display Technology

| A JOINT IEEE/OSA PUBLICATION

  • Vol. 9, Iss. 10 — Oct. 1, 2013
  • pp: 825–831

Performances of Microcrystalline Zinc Tin Oxide Thin-Film Transistors Processed by Spray Pyrolysis

Shanmugam Parthiban, Elamurugu Elangovan, Pradipta K. Nayak, Alexandra Gonçalves, Daniela Nunes, Luís Pereira, Pedro Barquinha, Tito Busani, Elvira Fortunato, and Rodrigo Martins

Journal of Display Technology, Vol. 9, Issue 10, pp. 825-831 (2013)


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Abstract

In this work, we report results concerning the performances of thin-film transistors (TFTs) where the channel layer is based on microcrystalline zinc tin oxide (ZTO) processed by spray pyrolysis technique. TFTs made with $\sim$ 30 nm thick ZTO channel layer deposited at a substrate temperature of 400 $^{\circ}{{C}}$ and 300 $^{\circ}{{C}}$ exhibited, respectively, a saturation mobility of $\sim {{2.9}}\ {{cm}}^{2}\cdot{{V}}^{-1}\cdot{{s}}^{-1}$ and 1.45 ${{cm}}^{2}\cdot{{V}}^{-1}\cdot{{s}}^{-1}$ ; ${V}_{\rm ON}$ voltage of $\sim$ 0.15 V, and 0.2 V; a sub-threshold swing of $\sim$ 400 mV/dec and 500 mV/dec; ON/OFF ratio at the onset of hard saturation current of $\sim {{3.5}}\times {{10}}^{5}$ and ${{6}}\times {{10}}^{3}$ , for a drain to source voltage of 10 V (close to or below the gate to source voltage). This indicates that the substrate temperature is relevant in determining the devices' electronic performances.

© 2013 IEEE

Citation
Shanmugam Parthiban, Elamurugu Elangovan, Pradipta K. Nayak, Alexandra Gonçalves, Daniela Nunes, Luís Pereira, Pedro Barquinha, Tito Busani, Elvira Fortunato, and Rodrigo Martins, "Performances of Microcrystalline Zinc Tin Oxide Thin-Film Transistors Processed by Spray Pyrolysis," J. Display Technol. 9, 825-831 (2013)
http://www.opticsinfobase.org/jdt/abstract.cfm?URI=jdt-9-10-825


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