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Journal of Display Technology

Journal of Display Technology


  • Vol. 9, Iss. 9 — Sep. 1, 2013
  • pp: 729–734

Extended-Gate ISFETs Based on Sputtered Amorphous Oxides

Joana V. Pinto, Rita Branquinho, Pedro Barquinha, Eduardo Alves, Rodrigo Martins, and Elvira Fortunato

Journal of Display Technology, Vol. 9, Issue 9, pp. 729-734 (2013)

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We present the results obtained with an extended-gate ISFET totally based on amorphous oxides (GIZO as the semiconductor, ${{Ta}}_{2}{{O}}_{5}{{:SiO}}_{2}$ as the dielectric and ${{Ta}}_{2}{{O}}_{5}$ as the sensitive layer). A full characterization of the device was performed with constant ionic strength pH buffer solutions, revealing a sensitivity of 40 mV/pH with small hysteresis, and good linearity in the pH 4–pH 10 range buffer solutions. These results clearly show that it is possible to produce room-temperature disposable and low cost bio-sensors.

© 2012 IEEE

Joana V. Pinto, Rita Branquinho, Pedro Barquinha, Eduardo Alves, Rodrigo Martins, and Elvira Fortunato, "Extended-Gate ISFETs Based on Sputtered Amorphous Oxides," J. Display Technol. 9, 729-734 (2013)

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