Abstract
A major issue in the fabrication of integrated Bragg grating (IBG) filters
in highly confined waveguides is the average effective index fluctuations
caused by sidewall roughness. In this work, we model the impact of this effect
on IBG spectral responses and we identify key parameters that need to be controlled
in order to minimize distortions. We show that only low spatial frequency
components of the noise are relevant to the calculation of the IBG spectral
response, which decreases considerably the computation time. Furthermore,
we present an IBG emulator that allows estimation of expected fabrication
yield of specific gratings given that the fabrication process is well characterized.
The analysis of apodized gratings is used as an example to illustrate how
this modeling can help to reduce development cost by first studying robustness
of IBG designs to fabrication limitations. Finally, we study analytically
the impact of sidewall roughness having short correlation lengths and small
roughness variances on the spectral response of weak gratings.
© 2011 IEEE
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