Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Journal of Lightwave Technology
  • Vol. 30,
  • Issue 14,
  • pp. 2299-2306
  • (2012)

An Approach for Measuring the Ellipsometric Parameters of Isotropic and Anisotropic Thin Films Using the Stokes Parameter Method

Not Accessible

Your library or personal account may give you access

Abstract

A method is proposed for extracting the ellipsometric parameters of isotropic and anisotropic thin films from the Stokes parameters obtained for five different input polarization lights, namely four linearly polarized lights and one right-hand circular polarized light. In the proposed approach, the genetic algorithm in curve fitting is used to extract the refractive index and thickness properties of the isotropic or anisotropic sample from the experimental results obtained for the variation of the ellipsometric parameters with the incident angle. Finally, the experimental values of the ellipsometric parameters and the simulated values are compared. It is shown that for a typical isotropic thin film, the average standard deviations of Ψ<sub><i>pp</i></sub> and Δ<sub><i>pp</i></sub> are 0.020° and 0.464°, respectively. Meanwhile, for a typical anisotropic thin film, the average standard deviations of Ψ<sub><i>pp</i></sub>, Ψ<sub><i>ps</i></sub>, Ψ<sub><i>sp</i></sub>, Δ<sub><i>pp</i></sub>, Δ<sub><i>ps</i></sub>, and Δ<sub><i>sp</i></sub> are found to be 0.014°, 0.047°, 0.041°, 0.312°, 0.402°, and 0.571°, respectively. Overall, the results presented in this study confirm that the proposed method provides a straightforward and reliable means of extracting the ellipsometric parameters of isotropic and anisotropic materials by Stokes parameters using five independent input polarization lights. Specially, the ellipsometric parameters of anisotropic thin film expressed by Stokes parameters or Mueller elements are explicitly presented.

© 2012 IEEE

PDF Article
More Like This

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved