Design, Tolerance Analysis, and Fabrication of Silicon Oxynitride Based Planar Optical Waveguides for Communication Devices
Journal of Lightwave Technology, Vol. 17, Issue 8, pp. 1401- (1999)
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Abstract
Planar optical waveguiding structures for application in communication networks are highly demanding with respect to low insertion loss, efficient fiber-to-chip coupling, polarization independent operation, high integration density, reliable fabrication, and last but not least cost efficiency. When applying silicon oxynitride, which is a very versatile material, planar waveguiding structures can be designed having the potential of meeting all those requirements. In this paper, we will describe the design of such a waveguiding structure, demonstrate the practical feasibility of realizing this structure and discuss the preliminary measurement results.
[IEEE ]
Citation
Kerstin rhoff, Paul V. Lambeck, and Alfred Driessen, "Design, Tolerance Analysis, and Fabrication of Silicon Oxynitride Based Planar Optical Waveguides for Communication Devices," J. Lightwave Technol. 17, 1401- (1999)
http://www.opticsinfobase.org/jlt/abstract.cfm?URI=jlt-17-8-1401
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