Abstract

Fully packaged 2 2 and 4 4 semiconductor optical switch modules are successfully developed by integrating spotsize converters (SSC's) consisting of lateral tapers, thin-film cores, and ridges in InGaAlAs-InAlAs muliple quantum-well (MQW) directional coupler waveguide switches in the 1.55-m wavelength region. Good reproducibility is obtained for the perfect coupling length of the directional coupler by appropriately designing the ridge width and gap of strip-loaded optical waveguides and by making use of the Cl2 reactive-ion-beam-etching and successive wet-etching. Since the switching time is sufficiently short (<70 ps, which is limited by the driver speed) for the 4 4 switch module, no bits are lost during a 10-Gb/s switching experiment at a wavelength of 1.55 m.

[IEEE ]

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