This paper demonstrates a flexible optical waveguide film with integrated optoelectronic devices (vertical-cavity surface-emitting laser (VCSEL) and p-i-n photodiode arrays) for fully embedded board-level optical interconnects. The optical waveguide circuit with 45° micromirror couplers was fabricated on a thin flexible polymeric substrate by soft molding. The 45° couplers were fabricated by cutting the waveguide with a microtome blade. The waveguide core material was SU-8 photoresist, and the cladding was cycloolefin copolymer. A thin VCSEL and p-i-n photodiode array were directly integrated on the waveguide film. Measured propagation loss of a waveguide was 0.6 dB/cm at 850 nm.
© 2004 IEEE
Chulchae Choi, Lei Lin, Yujie Liu, Jinho Choi, Li Wang, David Haas, Jerry Magera, and Ray T. Chen, "Flexible Optical Waveguide Film Fabrications and Optoelectronic Devices Integration for Fully Embedded Board-Level Optical Interconnects," J. Lightwave Technol. 22, 2168- (2004)