This paper presents simple fabrication of optical waveguides using a novel photosensitive polyimide (PSPI). PSPI has a glass transition temperature (Tg) of 330 °C and is directly patterned by ultraviolet (UV) exposure and wet-chemical development, lending itself to low-cost fabrication techniques. The fabricated waveguides possess low optical absorption at 1.3 and 1.5 µm. Single and multimode buried ridge waveguides were made and tested, and a 0.4-dB/cm optical propagation loss is measured at 1.55 µm.
© 2005 IEEE
N. Yurt, K. Mune, R. Naito, T. Fukuoka, A. Mochizuki, K. Matsumoto, G. Meredith, N. Peyghambarian, and G. E. Jabbour, "Fabrication and Characterization of Low-Loss Optical Waveguides Using a Novel Photosensitive Polyimide," J. Lightwave Technol. 23, 1291- (2005)