An experimental characterization of the grating couplers for sub-micrometer silicon-on-insulator (SOI) waveguides is presented. The grating couplers have been designed, realized, and characterized for the +1 diffraction order at an operating wavelength of 1.31 μm for TE polarization. At the resonant angle, a coupling efficiency higher than 55% has been measured. The angular coupling range and the wavelength tolerance have been evaluated to 3° and 20 nm, respectively. The grating coupler is followed by a taper, and about 50% of the input power at 1.31 μm is coupled into sub-micrometer rib and strip SOI waveguides. The ration between light power decoupled toward the cladding and light power decoupled toward the substrate is about three.
© 2006 IEEE
Laurent Vivien, Daniel Pascal, Sebastien Lardenois, Delphine Marris-Morini, Eric Cassan, Frédéric Grillot, Suzanne Laval, Jean-Marc Fédéli, and Loubna El Melhaoui, "Light Injection in SOI Microwaveguides Using High-Efficiency Grating Couplers," J. Lightwave Technol. 24, 3810-3815 (2006)