OSA's Digital Library

Journal of Lightwave Technology

Journal of Lightwave Technology


  • Vol. 24, Iss. 12 — Dec. 1, 2006
  • pp: 5095–5102

Tunable Optical Bandpass Filter With Variable-Aperture MEMS Reflector

Kyoungsik Yu, Daesung Lee, Namkyoo Park, and Olav Solgaard

Journal of Lightwave Technology, Vol. 24, Issue 12, pp. 5095-5102 (2006)

View Full Text Article

Acrobat PDF (2030 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


We report on a tunable optical bandpass filter with precise and independent control of its optical bandwidth and center wavelength. The optical filter is based on a double-pass monochromator configuration and a variable-aperture microelectromechanical systems (MEMS) reflector with two blocking micromirrors that manipulate the optical passband. The MEMS reflector is fabricated on the sidewalls of (110) silicon-on-insulator material by a combination of wet etching and deep reactive ion etching. The 1-dB optical bandwidth is continuously tunable from 3.65 to 6.35 nm by changing the position of the blocking micromirrors with lateral combdrive actuators. The center wavelength can be accurately controlled within a 30-nm spectral range by rotating the diffraction grating and/or changing the center location of the variable aperture with the combdrive actuators. The measured group delay variation across the passband was negligible.

© 2006 IEEE

Kyoungsik Yu, Daesung Lee, Namkyoo Park, and Olav Solgaard, "Tunable Optical Bandpass Filter With Variable-Aperture MEMS Reflector," J. Lightwave Technol. 24, 5095-5102 (2006)

Sort:  Journal  |  Reset


  1. A. H. Gnauck, S. Chandrasekhar, J. Leuthold, L. Stulz, "Demonstration of 42.7-Gb/s DPSK receiver with 45 photons/bit sensitivity," IEEE Photon. Technol. Lett. 15, 99-101 (2003).
  2. I. Lyubomirsky, B. Pitchumani, "Impact of optical filtering on duobinary transmission," IEEE Photon. Technol. Lett. 16, 1969-1971 (2004).
  3. Y. K. Su, L. Moller, R. Ryf, C. J. Xie, X. Liu, "Feasibility study of 0.8-b/s/Hz spectral efficiency at 160 Gb/s using phase-correlated RZ signals with vestigial sideband filtering," IEEE Photon. Technol. Lett. 16, 1388-1390 (2004).
  4. M. Pfennigbauer, M. M. Strasser, M. Pauer, P. J. Winzer, "Dependence of optically preamplified receiver sensitivity on optical and electrical filter bandwidths—Measurement and simulation," IEEE Photon. Technol. Lett. 14, 831-833 (2002).
  5. I. Lyubomirsky, S. Shetty, J. Roman, M. Y. Frankel, "Optimum 10-Gb/s NRZ receiver bandwidths for ultradense WDM transmission systems," IEEE Photon. Technol. Lett. 14, 870-872 (2002).
  6. L. Moller, J. H. Sinsky, H. Haunstein, S. Chandrasekhar, C. R. Doerr, L. Leuthold, C. A. Burrus, L. L. Buhl, "Higher order PMD distortion mitigation based on optical narrow bandwidth signal filtering," IEEE Photon. Technol. Lett. 14, 558-560 (2002).
  7. I. C. M. Littler, M. Rochette, B. J. Eggleton, "Adjustable bandwidth dispersionless bandpass FBG optical filter," Opt. Express 13, 3397-3407 (2005).
  8. D. O. Caplan, W. A. Atia, "A quantum-limited optically-matched communication link," Proc. Opt. Fiber Commun. Conf. (2001) pp. MM2-1-MM2-3.
  9. Y. Liu, E. Tangdiongga, Z. Li, S. Zhang, H. D. Waardt, G. D. Khoe, H. J. S. Dorren, "Error-free all-optical wavelength conversion at 160 Gb/s using a semiconductor optical amplifier and an optical bandpass filter," J. Lightw. Technol. 24, 230-236 (2006).
  10. L. Domash, M. Wu, N. Nemchuk, E. Ma, "Tunable and switchable multiple-cavity thin film filters," J. Lightw. Technol. 22, 126-135 (2004).
  11. E. Pawlowski, K. Takiguchi, M. Okuno, K. Sasayama, A. Himeno, K. Okamoto, Y. Ohmori, "Variable bandwidth and tunable centre frequency filter using transversal-form programmable optical filter," Electron. Lett. 32, 113-114 (1996).
  12. K. Yu, O. Solgaard, "Tunable optical transversal filters based on a Gires–Tournois interferometer with MEMS phase shifters," IEEE J. Sel. Topics Quantum Electron. 10, 588-597 (2004).
  13. T. Zhou, D. O. Lopez, M. E. Simon, F. Pardo, V. A. Aksyuk, D. T. Neilson, "MEMS-based 14 GHz resolution dynamic optical filter," Electron. Lett. 39, 1744-1746 (2003).
  14. D. T. Neilson, H. Tang, D. S. Greywall, N. R. Basavanhally, L. Ko, D. A. Ramsey, J. D. Weld, Y. L. Low, F. Pardo, D. O. Lopez, P. Busch, J. Prybyla, M. Haueis, C. S. Pai, R. Scotti, R. Ryf, "Channel equalization and blocking filter utilizing microelectromechanical mirrors," IEEE J. Sel. Topics Quantum Electron. 10, 563-569 (2004).
  15. M. Knapczyk, A. Krishnan, L. G. De Peralta, A. A. Bernussi, H. Temkin, "Reconfigurable optical filter based on digital mirror arrays," IEEE Photon. Technol. Lett. 17, 1743-1745 (2005).
  16. K. Yu, D. Lee, O. Solgaard, "Variable bandwidth optical filters with vertical micromirrors and silicon optical bench alignment technology," Proc. 17th Annu. Meeting IEEE LEOS (2004) pp. 531-532.
  17. K. Yu, N. Park, "Characterization of MEMS optical bandpass filters with narrow transition bands," Proc. SPIE—Opt. Transmission, Switching, and Subsyst. III (2005) pp. 2R1-2R8.
  18. G. Wilson, C. J. Chen, P. Gooding, J. E. Ford, "Spectral filter with independently variable center wavelength and bandwidth," Eur. Conf. Optical Commun. StockholmSweden (2004) Postdeadline Paper Th4.2.1.
  19. J. D. Berger, D. Anthon, S. Dutta, F. Ilkov, I. F. Wu, "Tunable MEMS devices for reconfigurable optical networks," Proc. OFC (2005) pp. OThD1.
  20. G. Lenz, B. J. Eggleton, C. R. Giles, C. K. Madsen, R. E. Slusher, "Dispersive properties of optical filters for WDM systems," IEEE J. Quantum Electron. 34, 1390-1402 (1998).
  21. T. Sano, T. Iwashima, M. Katayama, T. Kanie, M. Harumoto, M. Shigehara, H. Suganuma, M. Nishimura, "Novel multichannel tunable chromatic dispersion compensator based on MEMS and diffraction grating," IEEE Photon. Technol. Lett. 15, 1109-1110 (2003).
  22. D. T. Neilson, R. Ryf, F. Pardo, V. A. Aksyuk, M. E. Simon, D. O. Lopez, D. M. Marom, S. Chandrasekhar, "MEMS-based channelized dispersion compensator with flat passbands," J. Lightw. Technol. 22, 101-105 (2004).
  23. K. R. Wildnauer, Z. Azary, "A double-pass monochromator for wavelength selection in an optical spectrum analyzer," Hewlett-Packard J. 44, 68-74 (1993).
  24. E. G. Loewen, E. Popov, Diffraction Gratings and Applications (Marcel Dekker, 1997).
  25. S. H. Oh, D. M. Marom, "Attenuation mechanism effect on filter shape in channelized dynamic spectral equalizers," Appl. Opt. 43, 127-131 (2004).
  26. D. M. Marom, D. T. Neilson, D. S. Greywall, C. S. Pai, N. R. Basavanhally, V. A. Aksyuk, D. O. Lopez, F. Pardo, M. E. Simon, Y. Low, P. Kolodner, C. A. Bolle, "Wavelength-selective $1 \times K$ switches using free-space optics and MEMS micromirrors: Theory, design, and implementation," J. Lightw. Technol. 23, 1620-1630 (2005).
  27. D. Lee, K. Yu, O. Solgaard, "Vertical micromirror fabricated in (110) silicon device layer by combination of KOH and DRIE etch," Proc. IEEE/LEOS Int. Conf. Optical MEMS (2004) pp. 174-175.
  28. W. Noell, P. A. Clerc, L. Dellmann, B. Guldimann, H. P. Herzig, O. Manzardo, C. R. Marxer, K. J. Weible, R. Dandliker, N. F. Derooij, "Applications of SOI-based optical MEMS," IEEE J. Sel. Topics Quantum Electron. 8, 148-154 (2002).
  29. S. S. Yun, J. H. Lee, "A micromachined in-plane tunable optical filter using the thermo-optic effect of crystalline silicon," J. Micromech. Microeng. 13, 721-725 (2003).
  30. Y. Uenishi, M. Tsugai, M. Mehregany, "Micro-opto-mechanical devices fabricated by anisotropic etching of (110) silicon," J. Micromech. Microeng. 5, 305-312 (1995).
  31. W. H. Juan, S. W. Pang, "High-aspect-ratio Si vertical micromirror arrays for optical switching," J. Microelectromech. Syst. 7, 207-213 (1998).
  32. K. Yu, D. Lee, U. Krishnamoorthy, N. Park, O. Solgaard, "Micromachined Fourier transform spectrometer on silicon optical bench platform," Sens. Actuators A, Phys. 130/131, 523-530 (2006).
  33. D. Hah, P. R. Patterson, H. D. Nguyen, H. Toshiyoshi, M. C. Wu, "Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors," IEEE J. Sel. Topics Quantum Electron. 10, 505-513 (2004).
  34. J. Li, A. Q. Liu, Q. X. Zhang, "Tolerance analysis for comb-drive actuator using DRIE fabrication," Sens. Actuators A, Phys. 125, 494-503 (2006).
  35. W. J. Ye, S. Mukherjee, N. C. Macdonald, "Optimal shape design of an electrostatic comb drive in microelectromechanical systems," J. Microelectromech. Syst. 7, 16-26 (1998).
  36. J. D. Grade, H. Jerman, T. W. Kenny, "Design of large deflection electrostatic actuators," J. Microelectromech. Syst. 12, 335-343 (2003).
  37. Corning OptiFocus Collimating Lensed Fiber: Product Information (2003).
  38. S. Ryu, Y. Horiuchi, K. Mochizuki, "Novel chromatic dispersion measurement method over continuous gigahertz tuning range," J. Lightw. Technol. 7, 1177-1180 (1989).
  39. X. Liu, L. F. Mollenauer, X. Wei, "Impact of group-delay ripple in transmission systems including phase-modulated formats," IEEE Photon. Technol. Lett. 16, 305-307 (2004).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited