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Journal of Lightwave Technology

Journal of Lightwave Technology

| A JOINT IEEE/OSA PUBLICATION

  • Vol. 24, Iss. 12 — Dec. 1, 2006
  • pp: 5095–5102

Tunable Optical Bandpass Filter With Variable-Aperture MEMS Reflector

Kyoungsik Yu, Daesung Lee, Namkyoo Park, and Olav Solgaard

Journal of Lightwave Technology, Vol. 24, Issue 12, pp. 5095-5102 (2006)


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Abstract

We report on a tunable optical bandpass filter with precise and independent control of its optical bandwidth and center wavelength. The optical filter is based on a double-pass monochromator configuration and a variable-aperture microelectromechanical systems (MEMS) reflector with two blocking micromirrors that manipulate the optical passband. The MEMS reflector is fabricated on the sidewalls of (110) silicon-on-insulator material by a combination of wet etching and deep reactive ion etching. The 1-dB optical bandwidth is continuously tunable from 3.65 to 6.35 nm by changing the position of the blocking micromirrors with lateral combdrive actuators. The center wavelength can be accurately controlled within a 30-nm spectral range by rotating the diffraction grating and/or changing the center location of the variable aperture with the combdrive actuators. The measured group delay variation across the passband was negligible.

© 2006 IEEE

Citation
Kyoungsik Yu, Daesung Lee, Namkyoo Park, and Olav Solgaard, "Tunable Optical Bandpass Filter With Variable-Aperture MEMS Reflector," J. Lightwave Technol. 24, 5095-5102 (2006)
http://www.opticsinfobase.org/jlt/abstract.cfm?URI=jlt-24-12-5095

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