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Journal of Lightwave Technology

Journal of Lightwave Technology

| A JOINT IEEE/OSA PUBLICATION

  • Vol. 24, Iss. 5 — May. 1, 2006
  • pp: 2207–

Fabrication of Add-Drop Filters Based on Frequency-Matched Microring Resonators

Tymon Barwicz, Miloš A. Popović, Michael R. Watts, Peter T. Rakich, Erich P. Ippen, and Henry I. Smith

Journal of Lightwave Technology, Vol. 24, Issue 5, pp. 2207- (2006)


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Abstract

Frequency mismatches between resonators significantly impact the spectral responses of coupled resonator filters, such as high-order microring filters. In this paper, techniques allowing fabrication of frequency-matched high-index-contrast resonators are proposed, demonstrated, and analyzed. The main approach consists of inducing small dimensional changes in the resonators through alteration of the electron-beam dose used to expose either the actual resonator on a wafer or its image on a lithographic mask to be later used in filter fabrication. Third-order microring filters fabricated in silicon-rich silicon nitride, with optical resonator frequencies matched to better than 1 GHz, are reported. To achieve this, the average ring-waveguide widths of the microrings are matched to within less than 26 pm of a desired relative width offset. Furthermore, optimization and calibration procedures allowing strict dimensional control and smooth sidewalls are presented. A 5-nm dimensional control is demonstrated, and the standard deviation of sidewall roughness is reduced to below 1.6 nm.

© 2006 IEEE

Citation
Tymon Barwicz, Miloš A. Popović, Michael R. Watts, Peter T. Rakich, Erich P. Ippen, and Henry I. Smith, "Fabrication of Add-Drop Filters Based on Frequency-Matched Microring Resonators," J. Lightwave Technol. 24, 2207- (2006)
http://www.opticsinfobase.org/jlt/abstract.cfm?URI=jlt-24-5-2207

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