Abstract

We present high-efficiency grating couplers for coupling between a single-mode fiber and nanophotonic waveguides, fabricated both in silicon-on-insulator (SOI) and InP membranes using BenzoCycloButene wafer bonding. The coupling efficiency is substantially increased by adding a gold bottom mirror to the structures. The measured coupling efficiency to fiber is 69% for SOI grating couplers and 56% for bonded InP membrane grating couplers.

© 2007 IEEE

Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits

Yongbo Tang, Zhechao Wang, Lech Wosinski, Urban Westergren, and Sailing He
Opt. Lett. 35(8) 1290-1292 (2010)

Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides

Stijn Scheerlinck, Jonathan Schrauwen, Frederik Van Laere, Dirk Taillaert, Dries Van Thourhout, and Roel Baets
Opt. Express 15(15) 9625-9630 (2007)

Compact efficient broadband grating coupler for silicon-on-insulator waveguides

Dirk Taillaert, Peter Bienstman, and Roel Baets
Opt. Lett. 29(23) 2749-2751 (2004)

Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency

Wissem Sfar Zaoui, María Félix Rosa, Wolfgang Vogel, Manfred Berroth, Jörg Butschke, and Florian Letzkus
Opt. Express 20(26) B238-B243 (2012)

High efficiency grating coupler between silicon-on-insulator waveguides and perfectly vertical optical fibers

Günther Roelkens, Dries Van Thourhout, and Roel Baets
Opt. Lett. 32(11) 1495-1497 (2007)