We report on the design, fabrication, and optical characterization of silicon-on-insulator-based one-dimensional (1-D) photonic crystal (PhC) microcavities. The scope of this paper lies on filters for communication systems around 1.55-μm wavelength. Detailed calculations of filter performance against the relevant device layout parameters are given. Resonant cavity modes with quality factors as high as Q≈630 in the 1.55-μm wavelength band were measured for filters comprised of two PhC mirrors containing 2 × 5 holes, that were 200 nm in diameter. This is the highest Q-value reported of such a filter up to now.
© 2007 IEEE
Berndt Kuhlow, Georges Przyrembel, Stephanie Schlüter, Walter Fürst, Ralf Steingrüber, and Christiane Weimann, "Photonic Crystal Microcavities in SOI Photonic Wires for WDM Filter Applications," J. Lightwave Technol. 25, 421-431 (2007)