OSA's Digital Library

Journal of Lightwave Technology

Journal of Lightwave Technology


  • Vol. 25, Iss. 1 — Jan. 1, 2007
  • pp: 421–431

Photonic Crystal Microcavities in SOI Photonic Wires for WDM Filter Applications

Berndt Kuhlow, Georges Przyrembel, Stephanie Schlüter, Walter Fürst, Ralf Steingrüber, and Christiane Weimann

Journal of Lightwave Technology, Vol. 25, Issue 1, pp. 421-431 (2007)

View Full Text Article

Acrobat PDF (649 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


We report on the design, fabrication, and optical characterization of silicon-on-insulator-based one-dimensional (1-D) photonic crystal (PhC) microcavities. The scope of this paper lies on filters for communication systems around 1.55-μm wavelength. Detailed calculations of filter performance against the relevant device layout parameters are given. Resonant cavity modes with quality factors as high as Q≈630 in the 1.55-μm wavelength band were measured for filters comprised of two PhC mirrors containing 2 × 5 holes, that were 200 nm in diameter. This is the highest Q-value reported of such a filter up to now.

© 2007 IEEE

Berndt Kuhlow, Georges Przyrembel, Stephanie Schlüter, Walter Fürst, Ralf Steingrüber, and Christiane Weimann, "Photonic Crystal Microcavities in SOI Photonic Wires for WDM Filter Applications," J. Lightwave Technol. 25, 421-431 (2007)

Sort:  Year  |  Journal  |  Reset


  1. J. D. Joannopoulos, R. D. Meade, J. N. Winn, Photonic Crystals: Molding the Flow of Light (Princeton Univ. Press, 1995).
  2. D. J. Ripin, "One-dimensional photonic bandgap microcavities for strong optical confinement in GaAs and GaAs/ ${\rm Al}_x{\rm O}_y$ semiconductor waveguides," J. Lightw. Technol. 17, 2152-2160 (1999).
  3. P. R. Villeneuve, S. Fan, J. D. Joannopoulos, K.-Y. Lim, G. S. Petrich, L. A. Kolodziejski, R. Reif, "Air-bridge microcavities," Appl. Phys. Lett. 67, 167-169 (1995).
  4. Y. Akahane, T. Asano, B. S. Song, S. Noda, "High-Q photonic nanocavity in a two-dimensional photonic crystal," Nature 425, 944-947 (2003).
  5. P. R. Villeneuve, S. Fan, S. G. Johnson, J. D. Joannopoulos, "Three-dimensional photon confinement in photonic crystals of low-dimensional periodicity ," Proc. Inst. Electr. Eng.—Optoelectron. 145, 384-390 (1998).
  6. K.-Y. Lim, D. J. Ripin, G. S. Petrich, L. A. Kolodziejski, E. P. Ippen, M. Mondol, H. I. Smith, "Photonic band-gap waveguide microcavities: Monorail and air bridges," J. Vac. Sci. Technol. B, Microelectron. 17, 1171-1174 (1999).
  7. J. P. Zhang, D. Y. Chu, S. L. Wu, W. G. Bi, R. C. Tibori, R. M. Joseph, A. Taflove, C. W. Tu, S. T. Ho, "Nanofabrication of 1-D photonic bandgap structures along a photonic wire," IEEE Photon. Technol. Lett. 8, 491-493 (1996).
  8. A. S. Jugessur, R. M. De La Rue, P. Pottier, P. Viktorovitch, "One-dimensional photonic crystal microcavity with enhanced transmission," Integrated Photonics Research (IPR) Conf. VancouverBCCanada (2002) Paper IFD2.
  9. J. S. Foresi, "Photonic-bandgap microcavities in optical waveguides," Nature 390, 143-145 (1997).
  10. T. F. Krauss, B. Vögele, C. R. Stanley, R. M. De La Rue, "Waveguide microcavity based on photonic microstructure," IEEE Photon. Technol. Lett. 9, 176-178 (1997).
  11. D. Gerace, M. Agio, L. C. Andreani, P. Lalanne, "Cavity modes in one-dimensional photonic crystal slabs," Opt. Quantum Electron. 37, 277-292 (2005).
  12. M. Kimizuka, Y. Ozaki, Y. Watanabe, "Effect of plasma polymerization film on reducing damage of reactive ion etched silicon substrates with $\hbox{CHF}_{3}\!+\!\hbox{O}_{2}$ plasmas," J. Vac. Sci. Technol. B, Microelectron. Process. Phenom. 15, 66-69 (1997).
  13. M. Loncar, T. Doll, J. Vuckovic, A. Scherer, "Design and fabrication of silicon photonic crystal optical waveguides," J. Lightw. Technol. 18, 1402-1411 (2000).
  14. D. Van Thourhout, P. Dumon, W. Bogaerts, G. Roelkens, D. Taillaert, G. Priem, R. Paets, "Recent progress in SOI nanophotonic waveguides," Eur. Conf. Optical Commun. (ECOC) GlasgowU.K. (2005) Paper TU 3.6.2.
  15. K. K. Lee, D. R. Lim, L. C. Kimerling, "Fabrication of ultralow-loss $\hbox{Si}/\hbox{SiO}_{2}$ waveguides by roughness reduction," Opt. Lett. 26, 1888-1890 (2001).
  16. G. Przyrembel, B. Kuhlow, S. Schlüter, "Higher order PBG flat-top transmission waveguide filters in SOI," Eur. Conf. Optical Commun. (ECOC) RiminiItaly (2003) Paper Tu1.1.6.
  17. G. Przyrembel, B. Kuhlow, S. Schlüter, "Flat-top transmission waveguide filter with multiple cavities," Proc. Workshop and EOS Top. Meeting 2D Photonic Cryst. (2002) pp. 1-20.

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited