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Journal of Lightwave Technology

Journal of Lightwave Technology

| A JOINT IEEE/OSA PUBLICATION

  • Vol. 25, Iss. 3 — Mar. 1, 2007
  • pp: 850–860

Resonant Polymeric Waveguide Cantilever Integrated for Optical Scanning

Reynold Panergo, Cheng-Sheng Huang, Chao-Shih Liu, Per G. Reinhall, and Wei-Chih Wang

Journal of Lightwave Technology, Vol. 25, Issue 3, pp. 850-860 (2007)


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Abstract

We present SU-8 as an optical waveguide and its integration into a functional one- and two-dimensional (1-D and 2-D) scanning device. The waveguide is fabricated as a tapered structure and cantilever beam (100×85×2100 μm). It is mounted onto a 2-D coupled bimorph piezoelectric actuator and driven at resonant frequencies of 4.71 kHz in the vertical and 25 Hz in the horizontal. This raster motion allows for 2-D image scanning when in combination with a light source and detector. An analysis of the polymer's optical capabilities has shown mode coupling efficiencies of 96% and measured a total power output intensity of 20% with a 633-nm light source. The output power can be attributed to the butt-end coupling misalignment, scattering losses due to surface roughness, and absorption. The total vertical tip displacement is 669 μm with an angle of 25° when driven with a 47-μm base excitation. A specific application for the design is in the area of endoscopy, where there is a need for a minimally invasive device that reduces the discomfort experienced by the patient. SU-8 as the functional waveguide is the initial phase in creating a microfabricated endoscope system.

© 2007 IEEE

Citation
Reynold Panergo, Cheng-Sheng Huang, Chao-Shih Liu, Per G. Reinhall, and Wei-Chih Wang, "Resonant Polymeric Waveguide Cantilever Integrated for Optical Scanning," J. Lightwave Technol. 25, 850-860 (2007)
http://www.opticsinfobase.org/jlt/abstract.cfm?URI=jlt-25-3-850

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