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Journal of Lightwave Technology

Journal of Lightwave Technology


  • Vol. 27, Iss. 10 — May. 15, 2009
  • pp: 1387–1391

High $Q$-Factor Microrings Using Slightly Etched Rib Waveguides

Sylvain Maine, Delphine Marris-Morini, Laurent Vivien, Eric Cassan, Daniel Pascal, Suzanne Laval, Régis Orobtchouk, Bing Han, Taha Benyattou, Loubna El Melhaoui, and Jean-Marc Fédéli

Journal of Lightwave Technology, Vol. 27, Issue 10, pp. 1387-1391 (2009)

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The paper reports the design, fabrication and characterization of silicon-on-insulator (SOI) microring resonators using shallow etched rib waveguides. The variation of the $Q$-factor of microring resonators as a function of the ring diameter and coupling gap between the input waveguide and the ring is studied. Such structures are fabricated using e-beam lithography and reactive ion etching steps. Propagation loss of shallow etching rib waveguide has been evaluated to 0.8 dB/cm for wavelengths around 1550 nm. With a ring diameter of 100 $\mu{\rm m}$ and a coupling gap of 450 nm, the measured $Q$-factor is 35300. These results are matched by 3-D numerical optical modeling.

© 2009 IEEE

Sylvain Maine, Delphine Marris-Morini, Laurent Vivien, Eric Cassan, Daniel Pascal, Suzanne Laval, Régis Orobtchouk, Bing Han, Taha Benyattou, Loubna El Melhaoui, and Jean-Marc Fédéli, "High $Q$-Factor Microrings Using Slightly Etched Rib Waveguides," J. Lightwave Technol. 27, 1387-1391 (2009)

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  1. D. Marris, L. Vivien, D. Pascal, M. Rouvière, E. Cassan, A. Lupu, S. Laval, J. M. Fédéli, L. El Melhaoui, "Ultralow loss successive divisions using silicon-on-insulator microwaveguides," Appl. Phys. Lett. 87, 211102 (2005).
  2. F. Y. Gardes, G. T. Reed, N. G. Emerson, C. E. Png, "A sub-micron depletion-type photonic modulator in silicon on insulator," Opt. Exp. 13, 8845-8854 (2005) http://www.opticsexpress.org/abstract.cfm?id=86050.
  3. Q. Xu, B. Schmidt, S. Pradhan, M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
  4. L. Liao, D. Samara-Rubio, M. Morse, A. Liu, D. Hodge, D. Rubin, "High speed silicon Mach-Zehnder modulator," Opt. Express 13, 3129-3135 (2005) http://www.opticsexpress.org/abstract.cfm?id=83700.
  5. A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, M. Paniccia, "High-speed optical modulation based on carrier depletion in a silicon waveguide," Opt. Exp. 15, 660-668 (2007) http://www.opticsexpress.org/abstract.cfm?id=125498.
  6. D. Marris, A. Cordat, D. Pascal, A. Koster, E. Cassan, L. Vivien, S. Laval, "Design of a SiGe-Si quantum-well optical modulator," IEEE J. Sel. Topics Quantum Electron. 9, 747-754 (2003).
  7. S. Maine, D. Marris-Morini, L. Vivien, D. Pascal, E. Cassan, S. Laval, "Design optimization of SiGe/Si modulation-doped multiple quantum well modulator for high speed operation," Proc. SPIE 6183 (2006) pp. 618360D1-618360D6.
  8. D. Peyrade, E. Silberstein, P. Lalanne, A. Talneau, Y. Chen, "Short Bragg mirrors with adiabatic modal conversion," Appl. Phys. Lett. 81, 829-831 (2002).
  9. T. Baehr-Jones, M. Hochberg, C. Walker, A. Scherera, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85, 3346-3347 (2004).
  10. B. Miaoa, P. Yao, J. Murakowski, D. W. Prather, "Fabrication of silicon microring resonators with narrow coupling gaps," J. Microlithogr., Microfabric. Microsyst. 4, 023013(1)-023013(5) (2005).
  11. B. G. Lee, B. A. Small, K. Bergman, Q. Xu, M. Lipson, "Transmission of high-data-rate optical signals through a micrometer-scale silicon ring resonator," Opt. Lett. 31, 2701-2703 (2006).
  12. M. A. Webster, R. M. Pafchek, G. Sukumaran, T. L. Koch, "Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator," Appl. Phys. Lett. 87, 231108 (2005).
  13. I. Kiyat, A. Aydinli, "High-Q silicon-on-insulator optical rib waveguide racetrack resonators," Opt. Exp. 13, 1900-1905 (2005) http://www.opticsexpress.org/abstract.cfm?id=82991.
  14. A. Yariv, "Universal relations for coupling of optical power between microresonators and dielectric waveguides," Electron. Lett. 36, 321-322 (2000).
  15. J. Niehusmann, A. Vörckel, P. Haring Bolivar, T. Wahlbrink, W. Henschel, H. Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2004).
  16. Details are available at http://www.photond.com.

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