OSA's Digital Library

Journal of Lightwave Technology

Journal of Lightwave Technology

| A JOINT IEEE/OSA PUBLICATION

  • Vol. 27, Iss. 10 — May. 15, 2009
  • pp: 1415–1420

Metal Grating Patterning on Fiber Facets by UV-Based Nano Imprint and Transfer Lithography Using Optical Alignment

Stijn Scheerlinck, Peter Dubruel, Peter Bienstman, Etienne Schacht, Dries Van Thourhout, and Roel Baets

Journal of Lightwave Technology, Vol. 27, Issue 10, pp. 1415-1420 (2009)


View Full Text Article

Acrobat PDF (2285 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

UV-based nano imprint and transfer lithography (NITL) is proposed as a flexible, low cost and versatile approach for defining sub-micron metal patterns on optical fiber facets in a single-processing step. NITL relies on a specially prepared mold carrying the pattern that is to be transferred to the facet. The fiber's light-guiding properties allow control of the position of the metal structures by optical alignment.

© 2009 IEEE

Citation
Stijn Scheerlinck, Peter Dubruel, Peter Bienstman, Etienne Schacht, Dries Van Thourhout, and Roel Baets, "Metal Grating Patterning on Fiber Facets by UV-Based Nano Imprint and Transfer Lithography Using Optical Alignment," J. Lightwave Technol. 27, 1415-1420 (2009)
http://www.opticsinfobase.org/jlt/abstract.cfm?URI=jlt-27-10-1415


Sort:  Year  |  Journal  |  Reset

References

  1. D. A. Genov, A. K. Sarychev, V. M. Shalaev, A. Wei, "Resonant field enhancements from metal nanoparticle arrays," Nano Lett. 4, 153-158 (2004).
  2. W. L Barnes, A. Dereux, T. W. Ebbesen, "Surface plasmon subwavelength optics," Nature 424, 824-830 (2003).
  3. S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, R. Baets, "Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides," Opt. Exp. 15, 9639-9644 (2007).
  4. E. Cubukcu, E. A. Kort, K. B. Crozier, F. Capasso, "Plasmonic laser antenna," Appl. Phys. Lett. 89, 093120 (2006).
  5. E. J. Smythe, E. Cubukcu, F. Capasso, "Optical properties of surface plasmon resonances of coupled metallic nanorods," Opt. Exp. 15, 7439-7447 (2007).
  6. S. Scheerlinck, D. Taillaert, D. Van Thourhout, R. Baets, "Flexible metal grating based optical fiber probe for photonic integrated circuits," Appl. Phys. Lett. 92, 031104 (2008).
  7. A. Partovi, D. Peale, M. Wuttig, C. A. Murray, G. Zydzik, L. Hopkins, K. Baldwin, W. S. Hobson, J. Wynn, J. Lopata, L. Dhar, R. Chichester, J. H. Yeh, "High-power laser light source for near-field optics and its application to high-density optical data storage," Appl. Phys. Lett. 75, 1515-1517 (1999).
  8. F. Chen, A. Itagi, J. A. Bain, D. D. Stancil, T. E. Schlesinger, L. Stebounova, G. C. Walker, B. B. Akhremitchev, "Imaging of optical field confinement in ridge waveguides fabricated on a Very Small Aperture Laser (VSAL)," Appl. Phys. Lett. 83, 3245-3247 (2003).
  9. P. S. Kelkar, J. Beauvais, E. Lavallee, D. Drouin, M. Cloutier, D. Turcotte, P. Yang, L. K. Mun, R. Legario, Y. Awad, V. Aimez, "Nano patterning on optical fiber and laser diode facet with dry resist," J. Vac. Sci. Technol. A 22, 743-746 (2004).
  10. J. Schrauwen, D. Van Thourhout, R. Baets, "Focused-ion-beam fabricated vertical fiber couplers on silicon-on-insulator," Appl. Phys. Lett. 89, 141102 (2006).
  11. G. M. Kim, B. J. Kim, E. S. Ten Have, F. Segerink, N. F. Van Hulst, J. Brugger, "Photoplastic near-field optical probe with sub-100 nm aperture made by replication from a nanomould," J. of Microscopy 209, 267-271 (2002).
  12. S. Y. Chou, P. R. Krauss, P. J. Renstrom, "Imprint of sub-25 Nm Vias and trenches in polymers," Appl. Phys. Lett. 67, 3114-3116 (1995).
  13. L. J. Guo, "Nanoimprint lithography: Methods and material requirements," Adv. Mater. 19, 495-513 (2007).
  14. J. Viheriala, T. Niemi, J. Kontio, T. Rytkonen, M. Pessa, "Fabrication of surface reliefs on facets of singlemode optical fibres using nanoimprint lithography," Electron. Lett. 43, 150-152 (2007).
  15. S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, R. Baets, Optics Exp. 15, 9639 (2007).
  16. M. Bender, M. Otto, B. Hadam, B. Spangenberg, H. Kurz, "Multiple imprinting in UV-based nanoimprint lithography: Related material issues," Microelectron. Eng. 61–62, 407-413 (2002).
  17. P. Bienstman, R. Baets, "Optical modeling of photonic crystals and VCSEL's using eigenmode expansion and perfectly matched layers," Opt. Quantum Electron. 349-354 (2001).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article

OSA is a member of CrossRef.

CrossCheck Deposited