Abstract
The interconnection of waveguides inside a silica-based
planar lightwave circuit (PLC) is demonstrated both two- and three-dimensionally
by using a femtosecond laser. The waveguides written with a femtosecond laser
can be successfully connected to waveguides inside a PLC with low loss. Unlike
previous work on the direct writing of 2-D and 3-D waveguides in bulk glass,
the waveguide must be written a few tens of micrometers beneath the surface
of a PLC composed of multilayers of different glasses. To realize a low-loss
waveguide, we studied the sensitivity difference for femtosecond pulses in
each layer in detail and developed a multiple-scanning technique with a femtosecond
laser for writing waveguides. In addition, we investigated a mode-field (MF)
diameter control technique to allow us to achieve the low-loss interconnection
of PLC and written waveguides. We also studied particular problems caused
by nonlinear optical effects, such as the positional displacement of written
waveguides from the focal point. As a result, we achieved a low-loss waveguide
with almost the same MF diameter as a PLC waveguide and performed the first
demonstration of interconnection between PLC waveguides. The excess losses
at 1550 nm were 1.4 and 2.3 dB for 2-D and 3-D interconnection, respectively.
© 2009 IEEE
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