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Journal of Lightwave Technology

Journal of Lightwave Technology

| A JOINT IEEE/OSA PUBLICATION

  • Vol. 27, Iss. 18 — Sep. 15, 2009
  • pp: 4091–4096

Fabrication and Characterization of Small Optical Ridge Waveguides Based on SU-8 Polymer

Bo Yang, Liu Yang, Rui Hu, Zhen Sheng, Daoxin Dai, Qingkun Liu, and Sailing He

Journal of Lightwave Technology, Vol. 27, Issue 18, pp. 4091-4096 (2009)


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Abstract

Small SU-8 ridge optical waveguides with an air cladding and a SiO${}_{2}$ buffer on Si substrate have been realized by using a direct ultraviolet (UV) photolithography technology. The propagation loss measured by the cut-back method is about 0.1 dB/mm (@1550 nm) when the core width is 2.8 $\mu $m. The bending losses of the present SU-8 optical ridge waveguides are also characterized. The measured results show that the bending loss decreases exponentially as the bending radius increases and the total loss can be reduced effectively by introducing an appropriate offset between two connected sections with different curvatures. A small bending radius (as small as 75 $\mu $m) is still allowed for the requirement of a small bending loss ($< {0.1}~$ dB) when an offset of 0.1 $\mu $m is introduced. Finally, by using this kind of waveguide, a small 1$\,\times \,$2 Y-branch power splitter is fabricated and characterized.

© 2009 IEEE

Citation
Bo Yang, Liu Yang, Rui Hu, Zhen Sheng, Daoxin Dai, Qingkun Liu, and Sailing He, "Fabrication and Characterization of Small Optical Ridge Waveguides Based on SU-8 Polymer," J. Lightwave Technol. 27, 4091-4096 (2009)
http://www.opticsinfobase.org/jlt/abstract.cfm?URI=jlt-27-18-4091

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