Abstract
Statistical studies on the scanning electron microscope (SEM) images of
two-dimensional photonic crystal (PhC) slab cavities show that fabrication
errors in the size and position of etched air holes follow Gaussian
distribution. The influences on the characteristics of PhC cavities are then
investigated and compared with those caused by fabrication error with
widely-accepted uniform distribution through finite-difference time domain
(FDTD) simulation. As expected, Gaussian distribution in fabrication error
has more significant impact on cavity characteristics than uniform
distribution simply by their difference in the fourth moment.
© 2010 IEEE
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