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Journal of Lightwave Technology

Journal of Lightwave Technology


  • Vol. 28, Iss. 5 — Mar. 1, 2010
  • pp: 735–738

Develop-Free Solgel Fabrication of Low-Loss Embedded Channel Waveguide Array

Anhe He, Miao He, Shuti Li, Haiying Xing, Wenjie Wang, and Yang Li

Journal of Lightwave Technology, Vol. 28, Issue 5, pp. 735-738 (2010)

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We report on the fabrication of a 4-channel embedded waveguide array by a develop-free solgel process, adopted for the first time in waveguide fabrication to improve the sidewall roughness and simplify the fabrication procedures. A kind of novel hybrid HfO$_{2}$/SiO$_{2}$ solgel material, which can be used to form a crack-free thick film by a single spin-coating, was prepared to construct waveguide core and cladding, whose refractive index can be accurately set by adjusting ultraviolet (UV) exposure time. The average propagation losses of the fabricated single-mode channel waveguides were measured as low as $0.19 \pm 0.02$ dB/cm and $0.22 \pm 0.03$dB/cm at a wavelength of 1.55 $\mu$m for TE and TM polarizations, respectively.

© 2010 IEEE

Anhe He, Miao He, Shuti Li, Haiying Xing, Wenjie Wang, and Yang Li, "Develop-Free Solgel Fabrication of Low-Loss Embedded Channel Waveguide Array," J. Lightwave Technol. 28, 735-738 (2010)

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