We propose and demonstrate a semiconductor single microring resonator wavelength tunable filter utilizing InGaAs/InAlAs five-layer asymmetric coupled quantum wells for a fast low-power operation. A directional coupler with a shallow gap is used for coupling between busline and microring waveguides to control precisely the coupling efficiency. A wafer is grown by molecular beam epitaxy, and the waveguides are fabricated by two-step inductively coupled plasma reactive ion etching. The resonant wavelength shift of 0.9 nm is obtained under the reverse bias of 13 V.
© 2011 IEEE
Taro Makino, Tsuyoshi Gotoh, Ryo Hasegawa, Taro Arakawa, and Yasuo Kokubun, "Microring Resonator Wavelength Tunable Filter Using Five-Layer Asymmetric Coupled Quantum Well," J. Lightwave Technol. 29, 2387-2393 (2011)