Abstract
We propose and demonstrate a semiconductor single
microring resonator wavelength tunable filter utilizing
InGaAs/InAlAs five-layer asymmetric coupled quantum
wells for a fast low-power operation. A directional
coupler with a shallow gap is used for coupling between
busline and microring waveguides to control precisely
the coupling efficiency. A wafer is grown by molecular
beam epitaxy, and the waveguides are fabricated by
two-step inductively coupled plasma reactive ion
etching. The resonant wavelength shift of 0.9 nm is
obtained under the reverse bias of 13 V.
© 2011 IEEE
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