Abstract
A three-dimensional (3-D) adiabatic tapered coupler is demonstrated
to improve light coupling between single-mode fibers (SMF) and an integrated
photonic chip. This 3-D taper, made by polymer via a fabrication process using
mode extrusion in combination with photolithography, can have a large coupling
area matching with a fiber core. For a silicon oxynitride waveguide coupling
to a SMF, the measured coupler loss was 3 dB. The fiber misalignment tolerance
is 3.5 $\mu$m
and 3 to 5 $\mu$m
for the lateral and vertical offset, respectively, according to a 3-dB loss
window.
© 2011 IEEE
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