Abstract

A new integration technique of a 45-degree micromirror providing a vertical coupling between a free-space wave and a guided wave in a dielectric-glass waveguide for high-density intra-board optical interconnection was described. A planar waveguide consisting of a 4-μm-thickness GeO₂:SiO₂ guiding core layer and a 2-μm-thickness SiO₂ cladding layer on an SiO₂ substrate was used for characterization of the micromirror. A trench with 8-μm depth and 8-μm width was formed in the waveguide by using a dry etching technique. A photoresist filling the trench was exposed at an angle of 45 degrees in the water to give a 45-degree taper in the trench. Au was evaporated on the taper to give high-reflection micromirror. An excess loss due to the micromirror insertion was estimated to be about 2 dB by comparing insertion losses of waveguides with and without the micromirror.

© 2012 IEEE

Low-cost board-to-board optical interconnects using molded polymer waveguide with 45 degree mirrors and inkjet-printed micro-lenses as proximity vertical coupler

Xiaohui Lin, Amir Hosseini, Xinyuan Dou, Harish Subbaraman, and Ray T. Chen
Opt. Express 21(1) 60-69 (2013)

45 Degree Polymer Micromirror Integration for Board-Level Three-Dimensional Optical Interconnects

Fengtao Wang, Fuhan Liu, and Ali Adibi
Opt. Express 17(13) 10514-10521 (2009)

Stepped laser-ablation fabrication of concave micromirrors in rectangular optical waveguides for low loss vertical coupling

Chuanlu Deng, Xueting Wang, Ruhuan Zhang, Yi Huang, Xiaobei Zhang, and Tingyun Wang
Opt. Express 28(14) 20264-20276 (2020)

Design for polymer optical waveguides realizing efficient light coupling via 45-degree mirrors

Yoshie Morimoto and Takaaki Ishigure
Opt. Express 27(8) 10839-10853 (2019)

Stable, low-loss optical waveguides and micromirrors fabricated in acrylate polymers

J. P. D. Cook, G. O. Este, F. R. Shepherd, W. D. Westwood, J. Arrington, W. Moyer, J. Nurse, and S. Powell
Appl. Opt. 37(7) 1220-1226 (1998)