Abstract
Multimode Ti4+-diffused LiNbO3 planar waveguide doped with Sc3+ ions was fabricated by codiffusion of stacked Sc2O3 and Ti-metal thin film coated onto Z-cut congruent LiNbO3 substrate at 1060 °C in wet O2. The Ti4+-concentration was profiled by secondary ion mass spectrometry. The refractive index profile is constructed from measured mode index, and correlated with the Ti4+ profile. Other two related issues including the contribution of Sc
$^{3+}{\hbox{-}}$
doping to substrate refractive index and Li2O out-diffusion were also studied. The results show that the Sc3+-doping has little contribution to the substrate index and the Li2O out-diffusion was effectively suppressed. The index change and Ti4+-concentration follow an exponential relationship with a power index 0.54/0.79 for the ordinary/extraordinary ray. The relationship is similar to that of conventional Ti:LiNbO3 waveguide because of little contribution of Sc3+-doping to the substrate index and effective suppression for Li2O out-diffusion. Some considerations for fabricating an optical-damage-resistant Ti:Sc:LiNbO3 waveguide are given.
© 2014 IEEE
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