Abstract
Consistency is one of the most important parameters influenced on the
practicability of sensors. A fiber optic Fabry–Perot accelerometer (FPA) with a
diaphragm-mass-collimator (DMC) integrated structure to achieve high consistency is
presented. This design makes the structure more compacts and the manufacturing process
more controllable. Theoretical analysis is used to evaluate the performance of
sensitivity, resonant frequency, resolution, and dynamic range. Four DMC fiber optic
FPAs were manufactured, and experiments on several technical indicators were carried
out. The experimental results are close to the calculated values and show that the
maximum sensitivity difference of the DMC-FPAs is less than 0.38 dB (re: 0 dB = 1 V/g)
in a frequency band of 10–125 Hz, and the maximum sensitivity fluctuation is less
±0.36 dB. The results verify the improvements on consistency, and the reasons for the
good performances are discussed.
© 2014 IEEE
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