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Journal of the Optical Society of America

Journal of the Optical Society of America

  • Vol. 60, Iss. 4 — Apr. 1, 1970
  • pp: 490–494

Precision of Ellipsometric Measurement

E. SCHMIDT  »View Author Affiliations

JOSA, Vol. 60, Issue 4, pp. 490-494 (1970)

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By numerical analysis of the general formulas for standard ellipsometiric measurement, positions of the compensator, polarizer, and analyzer can be found such that the errors of Δ and ψ are minimized. Such optimal conditions can be found for any value of Δ and ψ from plots that are given. The improvement of precision over that of usual methods can be one order of magnitude or better in some Δ, ψ regions.

E. SCHMIDT, "Precision of Ellipsometric Measurement," J. Opt. Soc. Am. 60, 490-494 (1970)

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  1. R. J. Archer, Manual of Ellipsometry (Gaertner Scientific Corp., Chicago, 1968).
  2. A. Vašíček, Měřeni a vylvářeni tenkých vrstev v optice (Publishing House of CSAV, Prague, 1957).
  3. F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Std. (U. S.) 67A, 363 (1963).
  4. A. B. Winterbottom, Optical Studies of Metal Surfaces, Roy. Norwegian Sci. Soc. Rep. 1 (F. Bruns, Trondheim, Norway, 1955).
  5. A. Vašíček, Optics of Thin Films (North-Holland Publishing Co., Amsterdam, 1960).
  6. O. S. Heavens, in Physics of Thin Films, Vol. 2, G. Hass and R. Thun, Eds. (Academic Press Inc., New York, 1964), p. 193.
  7. F. Abelès, in Progress in Optics II, E. Wolf, Ed. (North-Holland Publishing Co., Amsterdam, 1963).

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