Effects of vacuum deposition conditions on ellipsometric parameters, optical constants, and reflectance of ultrapure aluminum films

J. H. Halford; F. K. Chin; J. E. Norman

doi:10.1364/JOSA.63.000786

Journal of the Optical Society of America
Vol. 63,
Issue 7,
pp. 786-792
(1973)
•https://doi.org/10.1364/JOSA.63.000786

Effects of vacuum deposition conditions on ellipsometric parameters, optical constants, and reflectance of ultrapure aluminum films

J. H. Halford, F. K. Chin, and J. E. Norman

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J. H. Halford, F. K. Chin, and J. E. Norman, "Effects of vacuum deposition conditions on ellipsometric parameters, optical constants, and reflectance of ultrapure aluminum films," J. Opt. Soc. Am. 63, 786-792 (1973)

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Abstract

This paper presents a method of controlling the ellipsometric parameters (Ψ,Δ), pseudo-optical constants (n,k), and reflectance (R) of freshly deposited aluminum films. By use of this method, values ofΔ,n, andR can be predicted from measurements of the terminal pressure/terminal deposition rate (terminal p/r ratio) prevailing during deposition of the surface region. The pseudo-optical constants and reflectances were calculated using the Ψ,Δ values. The highest-purity aluminum (99.9999%) was used and ellipsometric measurements were made immediately after removal of the films from the vacuum system. A review of existing literature on ellipsometric parameters, optical constants, and reflectance of aluminum films in the ultraviolet, visible, and infrared regions of the spectrum supports the theory that volume-oxide contamination is a primary factor affecting optical properties.

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Film No.	Film thickness (Å)	Terminal pressure (torr)	Terminal deposition rate (Å/min)	Terminal p/r ratio (torr · min · Å⁻¹)			Calculated			Time^a (min)
Film No.	Film thickness (Å)	Terminal pressure (torr)	Terminal deposition rate (Å/min)	Terminal p/r ratio (torr · min · Å⁻¹)	Δ(°)	ψ(°)	n	k	R	Time^a (min)
1	2210	4.0 × 10⁻⁵	2100	1.9 × 10⁻⁸	139.43	41.73	1.209	6.736	0.9037	7
2	1870	4.0 × 10⁻⁵	3620	1.11 × 10⁻⁸	138.98	41.73	1.185	6.658	0.9034	6
3	1480	3.0 × 10⁻⁵	6770	4.43 × 10⁻⁹	139.28	41.73	1.201	6.710	0.9036	6
4	2500	2.0 × 10⁻⁵	270	7.4 × 10⁻⁸	138.30	41.75	1.143	6.544	0.9036	6
5	2100	8.0 × 10⁻⁶	533	1.5 × 10⁻⁷	137.62	41.76	1.106	6.433	0.9034	6
6	1070	1.5 × 10⁻⁴	802	1.87 × 10⁻⁷	138.57	41.74	1.160	6.589	0.9035	6
7	2000	3.0 × 10⁻⁴	2380	1.26 × 10⁻⁷	137.37	41.76	1.094	6.392	0.9033	7
8	1050	4.0 × 10⁻⁴	186	2.5 × 10⁻⁶	131.77	41.32	0.988	5.550	0.8863	6
9	2070	3.3 × 10⁻⁴	698	4.72 × 10⁻⁷	137.30	41.70	1.110	6.375	0.9015	6
10	1780	1.0 × 10⁻⁴	60	1.67 × 10⁻⁶	134.52	41.44	1.064	5.932	0.8921	6
11	782	1.0 × 10⁻⁴	52.9	1.89 × 10⁻⁶	132.83	41.54	0.969	5.706	0.8936	6

Film No.	Film thickness (Å)	Terminal pressure (torr)	Terminal deposition rate (Å/min)	Terminal p/r ratio (torr · min · Å⁻¹)	Δ(°)	ψ(°)	Calculated			Time^a (min)
Film No.	Film thickness (Å)	Terminal pressure (torr)	Terminal deposition rate (Å/min)	Terminal p/r ratio (torr · min · Å⁻¹)	Δ(°)	ψ(°)	n	k	R	Time^a (min)
12₁	1275	7.15 × 10⁻⁵	6940	1.03 × 10⁻⁸	139.04	41.76	1.178	6.671	0.9043	12–18
12₂	2400	1.25 × 10⁻⁴	6110	2.05 × 10⁻⁸	138.24	41.74	1.143	6.537	0.9033	25–31
12₃	2887	1.3 × 10⁻⁴	600	2.17 × 10⁻⁷	137.25	41.69	1.111	6.366	0.9012	40–46
13₁	600	3.2 × 10⁻⁵	562	5.7 × 10⁻⁸	138.94	41.78	1.166	6.656	0.9048	12–23
13₂	750	7.25 × 10⁻⁵	457.5	1.58 × 10⁻⁷	137.34	41.69	1.115	6.381	0.9012	31–41
13₃	825	5.0 × 10⁻⁵	75.4	6.63 × 10⁻⁷	134.83	41.56	1.042	5.986	0.8958	50–59
14₁	900	4.8 × 10⁻⁵	3310	1.45 × 10⁻⁸	139.06	41.79	1.168	6.678	0.9052	12–17
14₂	1125	3.75 × 10⁻⁵	1025	3.66 × 10⁻⁸	138.22	41.74	1.142	6.530	0.9032	22–28
14₃	1265	3.4 × 10⁻⁵	468	7.27 × 10⁻⁸	137.63	41.73	1.116	6.432	0.9026	38–44

	n	R	Pressure (torr)	Average deposition rate (Å/min)	Average p/r ratio^a (torr · min · Å⁻¹)	λ(Å)
Hass (Ref. 5)	1.21^b	0.908^b	1 × 10⁻⁵	>18 000	<5.56 × 10⁻¹⁰	6328
Film No. 1	1.209	0.9037	4 × 10⁻⁵	2 100^c	1.9 × 10⁻⁸^d	6328
Schulz (Ref. 20)	1.15^b	0.898^b	1 × 10⁻⁵	2 000	5 × 10⁻⁹	6328
Bennett (Ref. 10)	…	0.9078^b	1 × 10⁻⁸	720	1.39 × 10⁻¹¹	6328
Film No. 14₁	1.168	0.9052	4.8 × 10⁻⁵	3 300^c	1.45 × 10⁻⁸^d	6328
Bennett (Ref. 9)	…	0.9009^b	1 × 10⁻⁵	>30 000	<3.33 × 10⁻¹⁰	6328

Film No.	Film thickness (Å)	Terminal pressure (torr)	Terminal deposition rate (Å/min)	Terminal p/r ratio (torr · min · Å⁻¹)			Calculated			Time^a (min)
Film No.	Film thickness (Å)	Terminal pressure (torr)	Terminal deposition rate (Å/min)	Terminal p/r ratio (torr · min · Å⁻¹)	Δ(°)	ψ(°)	n	k	R	Time^a (min)
1	2210	4.0 × 10⁻⁵	2100	1.9 × 10⁻⁸	139.43	41.73	1.209	6.736	0.9037	7
2	1870	4.0 × 10⁻⁵	3620	1.11 × 10⁻⁸	138.98	41.73	1.185	6.658	0.9034	6
3	1480	3.0 × 10⁻⁵	6770	4.43 × 10⁻⁹	139.28	41.73	1.201	6.710	0.9036	6
4	2500	2.0 × 10⁻⁵	270	7.4 × 10⁻⁸	138.30	41.75	1.143	6.544	0.9036	6
5	2100	8.0 × 10⁻⁶	533	1.5 × 10⁻⁷	137.62	41.76	1.106	6.433	0.9034	6
6	1070	1.5 × 10⁻⁴	802	1.87 × 10⁻⁷	138.57	41.74	1.160	6.589	0.9035	6
7	2000	3.0 × 10⁻⁴	2380	1.26 × 10⁻⁷	137.37	41.76	1.094	6.392	0.9033	7
8	1050	4.0 × 10⁻⁴	186	2.5 × 10⁻⁶	131.77	41.32	0.988	5.550	0.8863	6
9	2070	3.3 × 10⁻⁴	698	4.72 × 10⁻⁷	137.30	41.70	1.110	6.375	0.9015	6
10	1780	1.0 × 10⁻⁴	60	1.67 × 10⁻⁶	134.52	41.44	1.064	5.932	0.8921	6
11	782	1.0 × 10⁻⁴	52.9	1.89 × 10⁻⁶	132.83	41.54	0.969	5.706	0.8936	6

Film No.	Film thickness (Å)	Terminal pressure (torr)	Terminal deposition rate (Å/min)	Terminal p/r ratio (torr · min · Å⁻¹)	Δ(°)	ψ(°)	Calculated			Time^a (min)
Film No.	Film thickness (Å)	Terminal pressure (torr)	Terminal deposition rate (Å/min)	Terminal p/r ratio (torr · min · Å⁻¹)	Δ(°)	ψ(°)	n	k	R	Time^a (min)
12₁	1275	7.15 × 10⁻⁵	6940	1.03 × 10⁻⁸	139.04	41.76	1.178	6.671	0.9043	12–18
12₂	2400	1.25 × 10⁻⁴	6110	2.05 × 10⁻⁸	138.24	41.74	1.143	6.537	0.9033	25–31
12₃	2887	1.3 × 10⁻⁴	600	2.17 × 10⁻⁷	137.25	41.69	1.111	6.366	0.9012	40–46
13₁	600	3.2 × 10⁻⁵	562	5.7 × 10⁻⁸	138.94	41.78	1.166	6.656	0.9048	12–23
13₂	750	7.25 × 10⁻⁵	457.5	1.58 × 10⁻⁷	137.34	41.69	1.115	6.381	0.9012	31–41
13₃	825	5.0 × 10⁻⁵	75.4	6.63 × 10⁻⁷	134.83	41.56	1.042	5.986	0.8958	50–59
14₁	900	4.8 × 10⁻⁵	3310	1.45 × 10⁻⁸	139.06	41.79	1.168	6.678	0.9052	12–17
14₂	1125	3.75 × 10⁻⁵	1025	3.66 × 10⁻⁸	138.22	41.74	1.142	6.530	0.9032	22–28
14₃	1265	3.4 × 10⁻⁵	468	7.27 × 10⁻⁸	137.63	41.73	1.116	6.432	0.9026	38–44

Abstract

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Equations (1)

Journal of the Optical Society of America