Abstract

Small nonlinearity (~2%) of the light-flux detection system is shown to have appreciable effects on the accuracy of calibration and data analysis in rotating-analyzer ellipsometers. Procedures for detecting and correcting these effects are presented.

© 1976 Optical Society of America

Effects of component optical activity in data reduction and calibration of rotating-analyzer ellipsometers

D. E. Aspnes
J. Opt. Soc. Am. 64(6) 812-819 (1974)

Rotating-compensator/analyzer fixed-analyzer ellipsometer: Analysis and comparison to other automatic ellipsometers

D. E. Aspnes and P. S. Hauge
J. Opt. Soc. Am. 66(9) 949-954 (1976)

Effects of component imperfections on ellipsometer calibration

William Ralph Hunter
J. Opt. Soc. Am. 63(8) 951-957 (1973)

Error correction for calibration and data reduction in rotating-polarizer ellipsometry: applications to a novel multichannel ellipsometer

N. V. Nguyen, B. S. Pudliner, Ilsin An, and R. W. Collins
J. Opt. Soc. Am. A 8(6) 919-931 (1991)

Analysis of systematic errors in rotating-analyzer ellipsometers*

R. M. A. Azzam and N. M. Bashara
J. Opt. Soc. Am. 64(11) 1459-1469 (1974)