The reflection efficiencies for the various orders of diffraction produced by a grating are calculated under the following assumptions. The grating is for the most part flat, but with a fraction ε of the periodicity interval a described by a profile function z= ƒ(x). The reflection and transmission efficiencies are calculated as a series expansion in ε. Numerical calculations have been performed for the case of ultrasoft x rays incident at near grazing angles, using a complex index of refraction η = 1-δ₀λ²+iβ₀λ^3.25 or tabulated values. No effects of shadowing by the grating profile have been considered, and the numerical work has been done for a symmetrical triangular trench incised in the flat surface.

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription