OSA's Digital Library

Journal of the Optical Society of America

Journal of the Optical Society of America

  • Vol. 59, Iss. 1 — Jan. 1, 1969
  • pp: 64–71

Ellipsometric Method for the Determination of All the Optical Parameters of the System of an Isotropic Nonabsorbing Film on an Isotropic Absorbing Substrate. Optical Constants of Silicon

K. VEDAM, W. KNAUSENBERGER, and F. LUKES  »View Author Affiliations


JOSA, Vol. 59, Issue 1, pp. 64-71 (1969)
http://dx.doi.org/10.1364/JOSA.59.000064


View Full Text Article

Acrobat PDF (947 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

From a series of ellipsometric measurements it is now possible to obtain uniquely all of the optical parameters of the system; absorbing substrate+nonabsorbing surface film. The method utilizes the fact that the reflectance of such a system at normal incidence remains essentially constant for a small but finite range of surface-film thicknesses. Furthermore, it hinges on the fact that the ellipsometric parameters Δ and ψ, measured on different film thicknesses grown on the same sample, are compatible with only one choice of the complex refractive index n2 +ik2 of the substrate and the refractive index n1 of the film. Measurements on chemically etched samples of silicon yield n2 = 4.052 and k2 = 0.029, in agreement with the results of earlier workers. Measurements on cleaved samples of silicon, on the other hand, reveal that the true values are n2 = 4.140±0.02 and k2 = 0.034±0.01 for 5461 Å.

Citation
K. VEDAM, W. KNAUSENBERGER, and F. LUKES, "Ellipsometric Method for the Determination of All the Optical Parameters of the System of an Isotropic Nonabsorbing Film on an Isotropic Absorbing Substrate. Optical Constants of Silicon," J. Opt. Soc. Am. 59, 64-71 (1969)
http://www.opticsinfobase.org/josa/abstract.cfm?URI=josa-59-1-64


Sort:  Author  |  Journal  |  Reset

References

  1. R. J. Archer, J. Opt. Soc. Am. 52, 970 (1962).
  2. R. J. Archer, in Ellipsometry in the Measurement of Surfaces and Thin Films, E. Passaglia, R. R. Stromberg & J. Kruger, Eds., Natl. Bur. Stds. Misc. Publ. 256, U. S. Gov't Printing Off., Washington, 1964.
  3. D. K. Burge and H. E. Bennett, J. Opt. Soc. Am. 54, 1428 (1964).
  4. R. J. Archer, J. Electrochem. Soc. 104, 619 (1957); R. J. Archer, Phys. Rev. 110, 354 (1958).
  5. K. H. Zaininger and A. G. Revesz, J. Phys. Radium 25, 208 (1964).
  6. K. Vedam, R. Rai, F. Lukes, and R. Srinivasan, J. Opt. Soc. Am. 58, 526 (1968).
  7. A. Vašíček, Optics of Thin Films (North-Holland Publishing Co., Amsterdam 1960); O. S. Heavens, Optical Properties of Thin Solid Films (Butterworth's Scientific Publications, London, 1955).
  8. S. M. Fainshtein and V. I. Fistul, Sov. Phys.—Tech Phys. 1, 2099 (1957).
  9. A. Many and D. Herlich, Phys. Rev. 107, 404 (1957).
  10. G. W. Gobeli and F. G. Allen, J. Phys. Chem. Solids 14, 23 (1960); Phys. Rev. 127, 149 (1962).
  11. N. M. Bashara and D. W. Peterson, J. Opt. Soc. Am. 56, 1320 (1966).
  12. In Ref. (6) which deals with the refractive index of thin films of SiO2 on silicon, the computations will have to be redone using the new values of the optical constants of silicon reported in this paper. This can influence the value of n1, evaluated as well.
  13. W. C. Dash and R. Newman, Phys. Rev. 99, 1151 (1955).
  14. R. Braunstein, A. R. Moore, and F. Herman, Phys. Rev. 109, 695 (1958).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited