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Journal of the Optical Society of America

Journal of the Optical Society of America

  • Vol. 60, Iss. 4 — Apr. 1, 1970
  • pp: 490–494

Precision of Ellipsometric Measurement

E. SCHMIDT  »View Author Affiliations


JOSA, Vol. 60, Issue 4, pp. 490-494 (1970)
http://dx.doi.org/10.1364/JOSA.60.000490


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Abstract

By numerical analysis of the general formulas for standard ellipsometiric measurement, positions of the compensator, polarizer, and analyzer can be found such that the errors of Δ and ψ are minimized. Such optimal conditions can be found for any value of Δ and ψ from plots that are given. The improvement of precision over that of usual methods can be one order of magnitude or better in some Δ, ψ regions.

Citation
E. SCHMIDT, "Precision of Ellipsometric Measurement," J. Opt. Soc. Am. 60, 490-494 (1970)
http://www.opticsinfobase.org/josa/abstract.cfm?URI=josa-60-4-490

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