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Optical Constants of Aluminum Films Related to the Vacuum Environment

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Abstract

Ellipsometric measurements, in the visible wavelength range, have been made on thin aluminum films deposited in ultrahigh vacuum on glass substrates held at 25° or −196°C. The wide range of values found for the real and imaginary parts of the optical constants (n and k) can be explained in a consistent way if oxidation is taken into account. For unoxidized films the values of the constants are higher than those previously published. The value of k, which is not sensitive to structure and only slightly dependent on interband transitions, is in good agreement with theoretical values.

© 1970 Optical Society of America

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