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Journal of the Optical Society of America

Journal of the Optical Society of America

  • Vol. 61, Iss. 10 — Oct. 1, 1971
  • pp: 1392–1396

Film Thickness and Refractive Indices of Dielectric Films on Dielectric Substrates

M. RUIZ-URBIETA, E. M. SPARROW, and E. R. G. ECKERT  »View Author Affiliations


JOSA, Vol. 61, Issue 10, pp. 1392-1396 (1971)
http://dx.doi.org/10.1364/JOSA.61.001392


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Abstract

Methods are described for determining the refractive indices of dielectric films and substrates and the thickness of the film. The determination makes use of a single measured distribution of monochromatic, specular reflectance as a function of incidence angle. The methods are based on certain properties of the reflectance maxima and minima, which properties are deduced from electromagnetic theory. Either perpendicular-polarized or parallel-polarized light may be employed; the latter has some advantage, in that it provides a cross check on one of the results and also facilitates the treatment of very thin films.

Citation
M. RUIZ-URBIETA, E. M. SPARROW, and E. R. G. ECKERT, "Film Thickness and Refractive Indices of Dielectric Films on Dielectric Substrates," J. Opt. Soc. Am. 61, 1392-1396 (1971)
http://www.opticsinfobase.org/josa/abstract.cfm?URI=josa-61-10-1392


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References

  1. M. Born and E. Wolf, Principles of Optics (Pergamon, New York, 1964).
  2. M. Ruiz-Urbieta, E. M. Sparrow, and E. R. G. Eckert, J. Opt. Soc. Am. 61, 351 (1971).

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